Invention Application
US20120205550A1 OBJECTIVE LENS 有权
物镜

  • Patent Title: OBJECTIVE LENS
  • Patent Title (中): 物镜
  • Application No.: US13449435
    Application Date: 2012-04-18
  • Publication No.: US20120205550A1
    Publication Date: 2012-08-16
  • Inventor: Volker Drexel
  • Applicant: Volker Drexel
  • Applicant Address: DE Oberkochen
  • Assignee: CARL ZEISS NTS GMBH
  • Current Assignee: CARL ZEISS NTS GMBH
  • Current Assignee Address: DE Oberkochen
  • Priority: DE102007010873.9 20070306
  • Main IPC: H01J3/20
  • IPC: H01J3/20
OBJECTIVE LENS
Abstract:
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.
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