Invention Application
- Patent Title: OBJECTIVE LENS
- Patent Title (中): 物镜
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Application No.: US13449435Application Date: 2012-04-18
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Publication No.: US20120205550A1Publication Date: 2012-08-16
- Inventor: Volker Drexel
- Applicant: Volker Drexel
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS NTS GMBH
- Current Assignee: CARL ZEISS NTS GMBH
- Current Assignee Address: DE Oberkochen
- Priority: DE102007010873.9 20070306
- Main IPC: H01J3/20
- IPC: H01J3/20

Abstract:
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.
Public/Granted literature
- US08362443B2 Objective lens Public/Granted day:2013-01-29
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