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    OBJECTIVE LENS
    2.
    发明申请
    OBJECTIVE LENS 有权
    物镜

    公开(公告)号：US20100038538A1

    公开(公告)日：2010-02-18

    申请号：US12551783

    申请日：2009-09-01

    Applicant: Volker Drexel

    Inventor： Volker Drexel

    IPC: H01J3/20 ,  H01J3/18 ,  G01N23/22

    CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1471

    Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.

    Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。

    Electron-beam device and detector system
    4.
    发明授权
    Electron-beam device and detector system 有权
    电子束装置和检测器系统

    公开(公告)号：US07507962B2

    公开(公告)日：2009-03-24

    申请号：US11594691

    申请日：2006-11-08

    Applicant: Michael D. G. Steigerwald ,  Dirk Preikszas ,  Volker Drexel

    Inventor： Michael D. G. Steigerwald ,  Dirk Preikszas ,  Volker Drexel

    IPC: H01J37/28 ,  H01J37/244

    CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/0458 ,  H01J2237/2443 ,  H01J2237/24475 ,  H01J2237/2448

    Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.

    Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。

    Electron beam device
    5.
    发明申请
    Electron beam device 有权
    电子束装置

    公开(公告)号：US20090039257A1

    公开(公告)日：2009-02-12

    申请号：US11659145

    申请日：2005-07-28

    Applicant: Erik Essers ,  Gerd Benner ,  Volker Drexel

    Inventor： Erik Essers ,  Gerd Benner ,  Volker Drexel

    IPC: G21K7/00

    CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449

    Abstract: An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.

    Abstract translation: 电子束装置具有用于产生电子束的电子枪，用于将电子束聚焦在物体上的物镜和用于检测被物体背面散射的物体或电子发射的电子的至少一个检测器。 可以使用四极装置和设置在电子束装置中的这些装置的某些配置来简化和改进由物体发射或反向散射的电子的检测。

    Electron-beam device and detector system
    6.
    发明授权
    Electron-beam device and detector system 有权
    电子束装置和检测器系统

    公开(公告)号：US07425701B2

    公开(公告)日：2008-09-16

    申请号：US10756797

    申请日：2004-01-13

    Applicant: Michael D. G. Steigerwald ,  Dirk Preikszas ,  Volker Drexel

    Inventor： Michael D. G. Steigerwald ,  Dirk Preikszas ,  Volker Drexel

    IPC: H01J49/00

    CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/0458 ,  H01J2237/2443 ,  H01J2237/24475 ,  H01J2237/2448

    Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.

    Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。

    OBJECTIVE LENS
    7.
    发明申请
    OBJECTIVE LENS 有权
    物镜

    公开(公告)号：US20120205550A1

    公开(公告)日：2012-08-16

    申请号：US13449435

    申请日：2012-04-18

    Applicant: Volker Drexel

    Inventor： Volker Drexel

    IPC: H01J3/20

    CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1471

    Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.

    Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。

    Detector for variable pressure areas and an electron microscope comprising a corresponding detector
    8.
    发明申请
    Detector for variable pressure areas and an electron microscope comprising a corresponding detector 有权
    用于可变压力区域的检测器和包括相应检测器的电子显微镜

    公开(公告)号：US20050173644A1

    公开(公告)日：2005-08-11

    申请号：US10500951

    申请日：2001-06-29

    Applicant: Peter Gnauck ,  Volker Drexel ,  Erik Essers

    Inventor： Peter Gnauck ,  Volker Drexel ,  Erik Essers

    IPC: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  G01J1/00

    CPC classification number: H01J37/244

    Abstract: A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

    Abstract translation: 用于扫描电子显微镜的检测器，其可以在电子显微镜的样品室中在不同压力条件下使用，被设计用于检测电子和光。 为此目的，检测器具有光电检测器和用于在光电检测器之前连接的可见光透射的材料的闪烁体。 闪烁体可以具有对可见光透明的涂层。 通过应用不同的电位，检测器适用于检测高真空中的电子和检测样品室中高压的光。

    Particle beam device
    9.
    发明授权
    Particle beam device 有权
    粒子束装置

    公开(公告)号：US06498345B1

    公开(公告)日：2002-12-24

    申请号：US09339348

    申请日：1999-06-23

    Applicant: Eugen Weimer ,  Volker Drexel

    Inventor： Eugen Weimer ,  Volker Drexel

    IPC: H01J37244

    CPC classification number: H01J37/244 ,  H01J2237/2448 ,  H01J2237/28

    Abstract: In an electron beam device such as a raster electron microscope, two annular detectors are arranged at a distinct distance along the optical axis between a beam producer and an objective. The distance between the two detectors amounts to at least 25% of the distance between the specimen-side detector and the specimen. The source-side detector serves for detection of back-scattered or secondary electrons which are transmitted through the bore provided through the specimen-side detector for the passage of the primary particle beam. The source-side detector is a conversion diaphragm with an Everhart Thornley detector arranged laterally thereof. The conversion diaphragm produces secondary electrons on impingement of charged particles. By application of two detectors offset in the direction of the optical axis, the yield of the secondary electrons used for image production is increased. The secondary electrons are separated according to their angle of emergence from the specimen.

    Abstract translation: 在诸如光栅电子显微镜的电子束装置中，在光束产生器和物镜之间的沿着光轴的两个环形探测器被布置成不同的距离。 两个检测器之间的距离相当于样品侧检测器和样品之间的距离的至少25％。 源侧检测器用于检测通过穿过样品侧检测器提供的孔的后向散射或二次电子，用于一次粒子束的通过。 源侧检测器是其横向布置的Everhart Thornley检测器的转换隔膜。 转换膜片在带电粒子碰撞时产生二次电子。 通过施加沿光轴方向偏移的两个检测器，用于图像生成的二次电子的产量增加。 二次电子根据其与样品的出射角度分离。

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