发明申请
US20120206544A1 METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER LAYER, METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER LAYER FORMED BY THE METHOD, ELECTROMECHANICAL TRANSDUCER ELEMENT, INKJET HEAD AND INKJET RECORDING APPARATUS
有权
制造电化学传感器层的方法，制造机电传感器元件的方法，通过该方法形成的机电传感器层，机电传感器元件，喷嘴头和喷墨记录装置
- 专利标题： METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER LAYER, METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER LAYER FORMED BY THE METHOD, ELECTROMECHANICAL TRANSDUCER ELEMENT, INKJET HEAD AND INKJET RECORDING APPARATUS
- 专利标题（中）： 制造电化学传感器层的方法，制造机电传感器元件的方法，通过该方法形成的机电传感器层，机电传感器元件，喷嘴头和喷墨记录装置
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申请号： US13368631申请日： 2012-02-08
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公开(公告)号： US20120206544A1公开(公告)日： 2012-08-16
- 发明人: Osamu Machida , Atsushi Takeuchi , Dongsik Jang , Ryoh Tashiro
- 申请人： Osamu Machida , Atsushi Takeuchi , Dongsik Jang , Ryoh Tashiro
- 申请人地址： JP Tokyo
- 专利权人： RICOH COMPANY, LTD.
- 当前专利权人： RICOH COMPANY, LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-029975 20110215
- 主分类号： B41J2/045
- IPC分类号： B41J2/045 ; H01L21/02 ; H01L29/84
摘要：
Disclosed is a method of manufacturing an electromechanical transducer layer on a surface of a substrate, including discharging a solution including a source material to form the electromechanical transducer layer from a nozzle of a nozzle plate to coat the solution on the surface of the substrate while applying voltage between the nozzle plate and the substrate to charge the nozzle plate at a first polarity and the substrate at a second polarity opposite to the first polarity such that a split droplet split from a main droplet which is coated on the surface of the substrate becomes charged at the second polarity and is attracted and collected by the nozzle plate; and applying a heat treatment to the substrate on which the solution is coated to crystallize the solution to form the electromechanical transducer layer.
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