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1.发明授权Method of manufacturing electromechanical transducer layer, method of manufacturing electromechanical transducer element, electromechanical transducer layer formed by the method, electromechanical transducer element, inkjet head and inkjet recording apparatus 有权制造机电换能器层的方法，制造机电换能器元件的方法，通过该方法形成的机电换能器层，机电换能器元件，喷墨头和喷墨记录装置公开(公告)号：US08888253B2
公开(公告)日：2014-11-18
申请号：US13368631
申请日：2012-02-08
申请人： Osamu Machida , Atsushi Takeuchi , Dongsik Jang , Ryoh Tashiro
发明人： Osamu Machida , Atsushi Takeuchi , Dongsik Jang , Ryoh Tashiro
IPC分类号： B41J2/045 , B41J2/165 , H01L41/08 , H01L41/317 , B41J2/16 , H01L41/09 , H01L41/187
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , H01L41/0805 , H01L41/0973 , H01L41/1876 , H01L41/317
摘要： Disclosed is a method of manufacturing an electromechanical transducer layer on a surface of a substrate, including discharging a solution including a source material to form the electromechanical transducer layer from a nozzle of a nozzle plate to coat the solution on the surface of the substrate while applying voltage between the nozzle plate and the substrate to charge the nozzle plate at a first polarity and the substrate at a second polarity opposite to the first polarity such that a split droplet split from a main droplet which is coated on the surface of the substrate becomes charged at the second polarity and is attracted and collected by the nozzle plate; and applying a heat treatment to the substrate on which the solution is coated to crystallize the solution to form the electromechanical transducer layer.
摘要翻译： 公开了一种在基板的表面上制造机电换能器层的方法，包括排出包括源材料的溶液，以从喷嘴板的喷嘴形成机电换能器层，以在涂覆表面上涂布溶液 所述喷嘴板和所述基板之间的电压以第一极性对所述喷嘴板充电，并且所述基板处于与所述第一极性相反的第二极性，使得从涂覆在所述基板的表面上的主液滴分裂的分流液滴被充电 以第二极性吸引并被喷嘴板收集; 对涂布有溶液的基板进行热处理，使溶液结晶化，形成机电换能器层。
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2.发明申请METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER LAYER, METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER LAYER FORMED BY THE METHOD, ELECTROMECHANICAL TRANSDUCER ELEMENT, INKJET HEAD AND INKJET RECORDING APPARATUS 有权制造电化学传感器层的方法，制造机电传感器元件的方法，通过该方法形成的机电传感器层，机电传感器元件，喷嘴头和喷墨记录装置公开(公告)号：US20120206544A1
公开(公告)日：2012-08-16
申请号：US13368631
申请日：2012-02-08
申请人： Osamu Machida , Atsushi Takeuchi , Dongsik Jang , Ryoh Tashiro
发明人： Osamu Machida , Atsushi Takeuchi , Dongsik Jang , Ryoh Tashiro
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , H01L41/0805 , H01L41/0973 , H01L41/1876 , H01L41/317
摘要： Disclosed is a method of manufacturing an electromechanical transducer layer on a surface of a substrate, including discharging a solution including a source material to form the electromechanical transducer layer from a nozzle of a nozzle plate to coat the solution on the surface of the substrate while applying voltage between the nozzle plate and the substrate to charge the nozzle plate at a first polarity and the substrate at a second polarity opposite to the first polarity such that a split droplet split from a main droplet which is coated on the surface of the substrate becomes charged at the second polarity and is attracted and collected by the nozzle plate; and applying a heat treatment to the substrate on which the solution is coated to crystallize the solution to form the electromechanical transducer layer.
摘要翻译： 公开了一种在基板的表面上制造机电换能器层的方法，包括排出包括源材料的溶液，以从喷嘴板的喷嘴形成机电换能器层，以在涂覆表面上涂布溶液 所述喷嘴板和所述基板之间的电压以第一极性对所述喷嘴板充电，并且所述基板处于与所述第一极性相反的第二极性，使得从涂覆在所述基板的表面上的主液滴分裂的分流液滴被充电 以第二极性吸引并被喷嘴板收集; 对涂布有溶液的基板进行热处理，使溶液结晶化，形成机电换能器层。
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3.发明授权Thin-film forming apparatus, thin-film forming method, piezoelectric-element forming method, droplet discharging head, and ink-jet recording apparatus 有权薄膜形成装置，薄膜形成方法，压电元件形成方法，液滴喷射头和喷墨记录装置公开(公告)号：US08833921B2
公开(公告)日：2014-09-16
申请号：US13194230
申请日：2011-07-29
CPC分类号： B41J11/002 , B41J3/407 , B41J11/0015
摘要： A thin-film forming apparatus for forming a thin film on a substrate by using an ink-jet method includes an ink applying unit that applies an ink drop for thin-film formation to a predetermined area on a surface of the substrate; at least one laser light source for heating the ink drop thereby forming a thin film; and a laser-light irradiating unit that irradiates, with a laser light from the laser light source, a first spot positioned on a back side of the predetermined area of the substrate to which the ink drop has been applied.
摘要翻译： 通过使用喷墨方法在基板上形成薄膜的薄膜形成装置包括将涂膜用于薄膜形成的墨滴施加到基板表面上的规定区域; 至少一个用于加热墨滴的激光源，从而形成薄膜; 以及激光照射单元，其用来自激光光源的激光照射位于已经施加有墨滴的基板的预定区域的背面上的第一光点。
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公开(公告)号：US20120028075A1
公开(公告)日：2012-02-02
申请号：US13179711
申请日：2011-07-11
申请人： Masahiro YAGI , Eiichi Ohta , Yoshikazu Akiyama , Ryoh Tashiro , Osamu Machida
发明人： Masahiro YAGI , Eiichi Ohta , Yoshikazu Akiyama , Ryoh Tashiro , Osamu Machida
CPC分类号： H01L41/317 , C23C18/1216 , C23C18/14 , G01N21/8422 , G01N2021/8427
摘要： A thin film manufacturing method includes placing a substrate in a raw material solution with which a thin film is formed on a first principal plane of the substrate; forming the thin film on the first principal plane of the substrate by applying light to a first principal plane side from a light source; measuring a distance from the first principal plane of the substrate to a liquid surface of the raw material solution by applying light from the light source; and adjusting a position of the substrate in a height direction on the basis of a measurement result obtained at the measuring.
摘要翻译： 薄膜制造方法包括将基板放置在基板的第一主面上形成有薄膜的原料溶液中; 通过将光从光源施加到第一主平面侧，在所述基板的所述第一主平面上形成所述薄膜; 通过施加来自所述光源的光来测量从所述基板的所述第一主平面到所述原料溶液的液面的距离; 并且基于在测量中获得的测量结果来调整基板在高度方向上的位置。
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5.发明授权公开(公告)号：US09085145B2
公开(公告)日：2015-07-21
申请号：US14243177
申请日：2014-04-02
CPC分类号： B41J2/14201 , B41J2/161 , B41J2/164 , H01L41/047 , H01L41/318 , H01L41/331
摘要： Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.
摘要翻译： 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。
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6.发明授权公开(公告)号：US08727509B2
公开(公告)日：2014-05-20
申请号：US13486075
申请日：2012-06-01
IPC分类号： B41J2/045
CPC分类号： B41J2/14201 , B41J2/161 , B41J2/164 , H01L41/047 , H01L41/318 , H01L41/331
摘要： Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.
摘要翻译： 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。
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7.发明申请THIN-FILM FORMING APPARATUS, THIN-FILM FORMING METHOD, PIEZOELECTRIC-ELEMENT FORMING METHOD, DROPLET DISCHARGING HEAD, AND INK-JET RECORDING APPARATUS 有权薄膜成型装置，薄膜成型方法，压电元件成形方法，喷墨头和喷墨记录装置公开(公告)号：US20120026249A1
公开(公告)日：2012-02-02
申请号：US13194230
申请日：2011-07-29
CPC分类号： B41J11/002 , B41J3/407 , B41J11/0015
摘要： A thin-film forming apparatus for forming a thin film on a substrate by using an ink-jet method includes an ink applying unit that applies an ink drop for thin-film formation to a predetermined area on a surface of the substrate; at least one laser light source for heating the ink drop thereby forming a thin film; and a laser-light irradiating unit that irradiates, with a laser light from the laser light source, a first spot positioned on a back side of the predetermined area of the substrate to which the ink drop has been applied.
摘要翻译： 通过使用喷墨方法在基板上形成薄膜的薄膜形成装置包括将涂膜用于薄膜形成的墨滴施加到基板表面上的规定区域; 至少一个用于加热墨滴的激光源，从而形成薄膜; 以及激光照射单元，其用来自激光光源的激光照射位于已经施加有墨滴的基板的预定区域的背面上的第一光点。
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公开(公告)号：US08713768B2
公开(公告)日：2014-05-06
申请号：US13416055
申请日：2012-03-09
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/317 , H01L41/33
摘要： A method of producing a piezoelectric actuator includes a first electrode film forming process; a monomolecular film forming process; a pattering process of removing a monomolecular film having a rectangular shape; an application process of applying a precursor solution to the first electrode film exposed in the rectangular shape; a piezoelectric film forming process of converting the applied precursor solution into a piezoelectric film; and a second electrode film forming process. Materials of the precursor solution, the first electrode film, and the monomolecular film are adjusted so that the first electrode film is lyophilic and the monomolecular film is lyophobic to the precursor solution. The piezoelectric film forming process includes a drying and thermally decomposing process of drying and thermally decomposing the precursor solution; and a crystallizing process of crystallizing a thermally decomposed piezoelectric material.
摘要翻译： 制造压电致动器的方法包括：第一电极膜形成工序; 单分子成膜工艺; 去除具有矩形形状的单分子膜的图案化方法; 将前体溶液施加到以矩形形状暴露的第一电极膜的施加方法; 将所施加的前体溶液转化成压电膜的压电膜形成方法; 和第二电极膜形成工艺。 调节前体溶液，第一电极膜和单分子膜的材料，使得第一电极膜是亲液性的，并且单分子膜与前体溶液疏液。 压电薄膜形成方法包括干燥和热分解前体溶液的热分解过程; 以及结晶热分解压电材料的结晶过程。
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9.发明申请公开(公告)号：US20120314007A1
公开(公告)日：2012-12-13
申请号：US13486075
申请日：2012-06-01
IPC分类号： B41J2/045
CPC分类号： B41J2/14201 , B41J2/161 , B41J2/164 , H01L41/047 , H01L41/318 , H01L41/331
摘要： Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.
摘要翻译： 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。
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