发明申请
US20120208438A1 POLISHING SYSTEM HAVING A TRACK 审中-公开
具有轨迹的抛光系统

POLISHING SYSTEM HAVING A TRACK
摘要:
Embodiments described herein relate to a track system in a polishing system. One embodiment described herein provides a track system configured to transfer polishing heads in a polishing system. The track system comprises a supporting frame, a track coupled to the supporting frame and defining a path along which the polishing heads are configured to move, and one or more carriages configured to carry at least one polishing head along the path defined by the track, wherein the one or more carriages are coupled to the track and independently movable along the track.
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