发明申请
- 专利标题: SCANNING ELECTRON MICROSCOPE
- 专利标题(中): 扫描电子显微镜
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申请号: US13505517申请日: 2010-11-12
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公开(公告)号: US20120211654A1公开(公告)日: 2012-08-23
- 发明人: Toru Iwaya , Sakae Kobori , Tomohisa Ohtaki , Haruhiko Hatano
- 申请人: Toru Iwaya , Sakae Kobori , Tomohisa Ohtaki , Haruhiko Hatano
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-268670 20091126
- 国际申请: PCT/JP10/70188 WO 20101112
- 主分类号: H01J37/26
- IPC分类号: H01J37/26
摘要:
There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.
公开/授权文献
- US08921784B2 Scanning electron microscope 公开/授权日:2014-12-30