公开(公告)号：US20120211654A1

公开(公告)日：2012-08-23

申请号：US13505517

申请日：2010-11-12

申请人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

发明人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

IPC分类号： H01J37/26

CPC分类号： H01J37/143 ,  H01J37/04 ,  H01J37/141 ,  H01J37/26 ,  H01J37/28

摘要： There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

摘要翻译： 提供了能够实现装置的尺寸减小同时抑制柱温增加以及维持性能（例如分辨率等）的扫描电子显微镜。关于用于观察样品的扫描电子显微镜 通过从电子源发射并由聚光透镜聚焦的电子束照射样品，并且从样品检测二次电子，聚光透镜包括电磁线圈型聚光透镜和永磁体型聚光透镜。

公开(公告)号：US08921784B2

公开(公告)日：2014-12-30

申请号：US13505517

申请日：2010-11-12

申请人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

发明人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

IPC分类号： H01J37/143 ,  H01J37/141 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/143 ,  H01J37/04 ,  H01J37/141 ,  H01J37/26 ,  H01J37/28

摘要： There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

摘要翻译： 提供了能够实现装置的尺寸减小同时抑制柱温增加以及维持性能（例如分辨率等）的扫描电子显微镜。关于用于观察样品的扫描电子显微镜 通过从电子源发射并由聚光透镜聚焦的电子束照射样品，并且从样品检测二次电子，聚光透镜包括电磁线圈型聚光透镜和永磁体型聚光透镜。

公开(公告)号：US20090057558A1

公开(公告)日：2009-03-05

申请号：US12194141

申请日：2008-08-19

申请人： Toru Iwaya ,  Kenichi Hirane ,  Tomohisa Ohtaki

发明人： Toru Iwaya ,  Kenichi Hirane ,  Tomohisa Ohtaki

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J37/065 ,  H01J37/067 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/0835

摘要： An object of the invention is provide a scanning electron microscope including a permanent magnet forming a condenser lens with a variable value of probe current.To achieve the object, the scanning electron microscope including the permanent magnet forming the condenser lens as an embodiment of the invention, includes a mechanism for adjusting a distance between an electron source and an anode electrode. Further, the mechanism for adjusting the distance between the electron source and the anode electrode, includes a removable spacer arranged under a lower portion of the anode electrode.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括形成具有可变探头电流值的聚光透镜的永磁体。 为了实现该目的，包括形成聚光透镜的永磁体作为本发明的实施例的扫描电子显微镜包括用于调节电子源和阳极之间的距离的机构。 此外，用于调整电子源和阳极电极之间的距离的机构包括布置在阳极电极的下部下方的可移除间隔物。

公开(公告)号：US20140246583A1

公开(公告)日：2014-09-04

申请号：US14349630

申请日：2012-09-03

申请人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

发明人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

摘要： Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.

摘要翻译： 提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。 具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间， 能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴， 粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。

公开(公告)号：US08809782B2

公开(公告)日：2014-08-19

申请号：US13387424

申请日：2010-07-20

申请人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

发明人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

IPC分类号： H01J37/00 ,  H01J37/16 ,  F16F15/04 ,  H01J37/28

CPC分类号： H01J37/28 ,  F16F15/04 ,  H01J37/16 ,  H01J2237/0216

摘要： A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

摘要翻译： 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元，主扫描电子显微镜单元上的控制器，容纳主扫描电子显微镜单元和控制器的单个壳体，底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上，在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔，并且阻尼器固定到底面 的主扫描电子显微镜单元，并且通过第一开孔设置。

公开(公告)号：US20140021347A1

公开(公告)日：2014-01-23

申请号：US14111174

申请日：2012-03-02

申请人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

发明人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

IPC分类号： H01J37/16 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

摘要： Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

摘要翻译： 提供一种能够在空气气氛或气体环境中观察观察目标样品的带电粒子束装置或带电粒子显微镜，而不会对传统的高真空带电粒子显微镜的构造进行显着变化。 在构成为使用薄膜（10）分离真空环境和空气气氛（或气体环境）的带电粒子束装置中，能够保持薄膜（10）的附件（121），其内部 可以在空气气氛中保持，或者将气体环境插入到高真空带电粒子显微镜的真空室（7）中。 附件（121）被真空密封并固定到真空样品室的真空隔板。 通过用氦气或具有比大气气体如氮气或水蒸气更低的质量的轻质气体代替附件中的气氛来进一步改善图像质量。

公开(公告)号：USD633538S1

公开(公告)日：2011-03-01

申请号：US29356748

申请日：2010-03-02

申请人： Mitsuru Oonuma ,  Akira Omachi ,  Masahiko Ajima ,  Tomohisa Ohtaki

设计人： Mitsuru Oonuma ,  Akira Omachi ,  Masahiko Ajima ,  Tomohisa Ohtaki

公开(公告)号：USD625749S1

公开(公告)日：2010-10-19

申请号：US29339397

申请日：2009-06-30

申请人： Mitsuru Oonuma ,  Akira Omachi ,  Masahiko Ajima ,  Tomohisa Ohtaki

设计人： Mitsuru Oonuma ,  Akira Omachi ,  Masahiko Ajima ,  Tomohisa Ohtaki

公开(公告)号：US20060219912A1

公开(公告)日：2006-10-05

申请号：US11354067

申请日：2006-02-15

申请人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

发明人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

IPC分类号： G21K7/00 ,  G01N23/00

CPC分类号： H01J37/265 ,  G01N23/04 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2608

摘要： In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

摘要翻译： 在环境扫描电子显微镜中，其中实现将电子光学系统和样品室之间的压力比保持在预定值的差分泵浦，并且调节探针电流以满足预定值或更大的值，以便能够观察 在低真空中的未煮过的食物和潮湿样品中，提供了三级物镜孔，用作电子光学系统中用于电子束的物镜的孔，并且还用作差分泵浦的孔，用于保持电子光学 系统和样本室处于预定值。 然后，将电子光学系统中的电子束的偏转支点设置在三级物镜孔的中间阶段。

公开(公告)号：US09165741B2

公开(公告)日：2015-10-20

申请号：US14235892

申请日：2012-07-04

申请人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

发明人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

IPC分类号： H01J37/06 ,  H01J37/18 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

摘要： A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

摘要翻译： 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。