公开(公告)号：US08921784B2

公开(公告)日：2014-12-30

申请号：US13505517

申请日：2010-11-12

申请人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

发明人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

IPC分类号： H01J37/143 ,  H01J37/141 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/143 ,  H01J37/04 ,  H01J37/141 ,  H01J37/26 ,  H01J37/28

摘要： There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

摘要翻译： 提供了能够实现装置的尺寸减小同时抑制柱温增加以及维持性能（例如分辨率等）的扫描电子显微镜。关于用于观察样品的扫描电子显微镜 通过从电子源发射并由聚光透镜聚焦的电子束照射样品，并且从样品检测二次电子，聚光透镜包括电磁线圈型聚光透镜和永磁体型聚光透镜。

公开(公告)号：US20120211654A1

公开(公告)日：2012-08-23

申请号：US13505517

申请日：2010-11-12

申请人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

发明人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

IPC分类号： H01J37/26

CPC分类号： H01J37/143 ,  H01J37/04 ,  H01J37/141 ,  H01J37/26 ,  H01J37/28

摘要： There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

摘要翻译： 提供了能够实现装置的尺寸减小同时抑制柱温增加以及维持性能（例如分辨率等）的扫描电子显微镜。关于用于观察样品的扫描电子显微镜 通过从电子源发射并由聚光透镜聚焦的电子束照射样品，并且从样品检测二次电子，聚光透镜包括电磁线圈型聚光透镜和永磁体型聚光透镜。

公开(公告)号：US20080202920A1

公开(公告)日：2008-08-28

申请号：US12071543

申请日：2008-02-22

申请人： Toru Iwaya ,  Hirobumi Muto ,  Sakae Kobori

发明人： Toru Iwaya ,  Hirobumi Muto ,  Sakae Kobori

IPC分类号： C23C14/00

CPC分类号： H01J37/3053 ,  G01N1/32 ,  H01J37/20 ,  H01J2237/20214

摘要： In an ion milling system and an ion milling method for making unnecessary the effort of resetting a sample in a sample stage mechanism whenever a machining region is changed, the system includes an ion gun that generates an ion beam with which a sample is to be irradiated, a sample chamber within which the sample to be subjected to irradiation processing by the ion beam is put, an exhaust that evacuates air in order to maintain vacuum in the sample chamber, a gas injection mechanism that injects ion-generating gas, and a sample stage mechanism in which the sample is placed and which rotates with the sample set thereon. The sample stage mechanism has a rotary table that rotates with the sample set thereon, a rotating mechanism that drives the rotary table, an eccentric mechanism capable of eccentrically adjusting a positional relationship between a rotation center axis of the rotary table and a centerline of the ion beam, and a sample position adjusting mechanism capable of eccentrically adjusting a positional relationship between a centerline of the sample set on the sample stage and the rotation center axis of the rotary table.

摘要翻译： 在离子铣削系统和离子铣削方法中，每当加工区域改变时，不需要在样品台机构中复位样品的努力，该系统包括产生离子束的离子枪，样品将被照射 放置用于通过离子束进行照射处理的样品的样品室，排出空气以在样品室中保持真空的排气，注入离子产生气体的气体注入机构和样品 其中样品被放置并且随着样品在其上旋转而旋转。 样品台机构具有旋转台，其上设置有样品，旋转台，驱动旋转台的旋转机构，能够偏心地调节旋转台的旋转中心轴与离子的中心线之间的位置关系的偏心机构 光束和样品位置调节机构，其能够偏心地调节样品台上的样品集合的中心线与旋转台的旋转中心轴线之间的位置关系。