发明申请
US20120211845A1 Integrated Circuit with Sensor and Method of Manufacturing Such an Integrated Circuit
有权
具有传感器的集成电路和制造这种集成电路的方法
- 专利标题： Integrated Circuit with Sensor and Method of Manufacturing Such an Integrated Circuit
- 专利标题（中）： 具有传感器的集成电路和制造这种集成电路的方法
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申请号： US13398158申请日： 2012-02-16
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公开(公告)号： US20120211845A1公开(公告)日： 2012-08-23
- 发明人: Roel Daamen , Robertus Adrianus Maria Wolters , Rene Theodora Hubertus Rongen , Youri Victorovitch Ponomarev
- 申请人： Roel Daamen , Robertus Adrianus Maria Wolters , Rene Theodora Hubertus Rongen , Youri Victorovitch Ponomarev
- 申请人地址： NL Eindhoven
- 专利权人： NXP B.V.
- 当前专利权人： NXP B.V.
- 当前专利权人地址： NL Eindhoven
- 优先权： EP11155468.9 20110222
- 主分类号： H01L29/66
- IPC分类号： H01L29/66 ; H01L21/02
摘要：
Disclosed is an integrated circuit comprising a substrate (10) carrying a plurality of circuit elements; a metallization stack (12, 14, 16) interconnecting said circuit elements, said metallization stack comprising a patterned upper metallization layer comprising a first metal portion (20); a passivation stack (24, 26, 28) covering the metallization stack; and a sensor including a sensing material (40) on the passivation stack, said sensor being coupled to the first metal portion by a via (34) extending through the passivation stack. A method of manufacturing such an IC is also disclosed.
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