发明申请
- 专利标题: EPITAXIAL FORMATION SUPPORT STRUCTURES AND ASSOCIATED METHODS
- 专利标题(中): 外来形成支持结构和相关方法
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申请号: US13465867申请日: 2012-05-07
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公开(公告)号: US20120220064A1公开(公告)日: 2012-08-30
- 发明人: Calvin Wade Sheen
- 申请人: Calvin Wade Sheen
- 申请人地址: US ID Boise
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L33/32
- IPC分类号: H01L33/32 ; H01L21/762
摘要:
Epitaxial formation support structures and associated methods of manufacturing epitaxial formation support structures and solid state lighting devices are disclosed herein. In several embodiments, a method of manufacturing an epitaxial formation support substrate can include forming an uncured support substrate that has a first side, a second side opposite the first side, and coefficient of thermal expansion substantially similar to N-type gallium nitride. The method can further include positioning the first side of the uncured support substrate on a first surface of a first reference plate and positioning a second surface of a second reference plate on the second side to form a stack. The first and second surfaces can include uniformly flat portions. The method can also include firing the stack to sinter the uncured support substrate. At least side of the support substrate can form a planar surface that is substantially uniformly flat.
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