发明申请
- 专利标题： LASER PROCESSING METHOD FOR NONLINEAR CRYSTAL SUBSTRATE
- 专利标题（中）： 非线性晶体衬底的激光加工方法
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申请号： US13413827申请日： 2012-03-07
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公开(公告)号： US20120234809A1公开(公告)日： 2012-09-20
- 发明人: Hiroshi Morikazu , Yoko Nishino
- 申请人： Hiroshi Morikazu , Yoko Nishino
- 申请人地址： JP Tokyo
- 专利权人： DISCO CORPORATION
- 当前专利权人： DISCO CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-058861 20110317
- 主分类号： B23K26/00
- IPC分类号： B23K26/00
摘要：
A laser processing method for a nonlinear crystal substrate having a plurality of crossing division lines which includes the step of applying a pulsed laser beam to a work surface of the nonlinear crystal substrate along the division lines to thereby form a plurality of laser processed grooves on the work surface along the division lines. The pulse width of the pulsed laser beam is set to 200 ps or less and the repetition frequency of the pulsed laser beam is set to 50 kHz or less.
公开/授权文献
- US09174306B2 Laser processing method for nonlinear crystal substrate 公开/授权日：2015-11-03
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