发明申请
- 专利标题: SUPPORTING MEMBRANES ON NANOMETER-SCALE SELF-ASSEMBLED FILMS
- 专利标题(中): 在纳米尺寸自组装膜上支撑膜
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申请号: US13482944申请日: 2012-05-29
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公开(公告)号: US20120237733A1公开(公告)日: 2012-09-20
- 发明人: Joan K. Bosworth , Elizabeth A. Dobisz , Ricardo Ruiz , Franck D. Rose dit Rose
- 申请人: Joan K. Bosworth , Elizabeth A. Dobisz , Ricardo Ruiz , Franck D. Rose dit Rose
- 申请人地址: NL Amsterdam
- 专利权人: HGST NETHERLANDS B.V.
- 当前专利权人: HGST NETHERLANDS B.V.
- 当前专利权人地址: NL Amsterdam
- 主分类号: B32B3/12
- IPC分类号: B32B3/12
摘要:
Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure includes a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. Other systems and methods are disclosed as well.
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