发明申请
US20120237733A1 SUPPORTING MEMBRANES ON NANOMETER-SCALE SELF-ASSEMBLED FILMS 有权
在纳米尺寸自组装膜上支撑膜

SUPPORTING MEMBRANES ON NANOMETER-SCALE SELF-ASSEMBLED FILMS
摘要:
Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure includes a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. Other systems and methods are disclosed as well.
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