发明申请
- 专利标题: SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US13515435申请日: 2010-12-13
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公开(公告)号: US20120248399A1公开(公告)日: 2012-10-04
- 发明人: Yoshitaka Sasago , Akio Shima , Satoru Hanzawa , Takashi Kobayashi , Masaharu Kinoshita , Norikastsu Takaura
- 申请人: Yoshitaka Sasago , Akio Shima , Satoru Hanzawa , Takashi Kobayashi , Masaharu Kinoshita , Norikastsu Takaura
- 优先权: JP2009-285876 20091217
- 国际申请: PCT/JP2010/072398 WO 20101213
- 主分类号: H01L27/24
- IPC分类号: H01L27/24
摘要:
Disclosed are a semiconductor storage device and a method for manufacturing the semiconductor storage device, whereby the bit cost of memory using a variable resistance material is reduced. The semiconductor storage device has: a substrate; a first word line (2) which is provided above the substrate; a first laminated body, which is disposed above the first word line (2), and which has the N+1 (N≧1) number of first inter-gate insulating layers (11-15) and the N number of first semiconductor layers (21p-24p) alternately laminated in the height direction of the substrate; a first bit line (3), which extends in the direction that intersects the first word line (2), and which is disposed above the laminated body; a first gate insulating layer (9) which is provided on the side surface of the N+1 number of the first inter-gate insulating layers (11-15) and those of the N number of the first semiconductor layers (21p-24p); a first channel layer (8p) which is provided on the side surface of the first gate insulating layer (9); and a first variable resistance material layer (7) which is provided on the side surface of the first channel layer. The first variable material layer (7) is in a region where the first word line (2) and the first bit line (3) intersect each other. Furthermore, a polysilicon diode (PD) is used as a selection element.
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