发明申请
US20120252171A1 NON-VOLATILE MEMORY AND LOGIC CIRCUIT PROCESS INTEGRATION 有权
非易失性存储器和逻辑电路过程集成

  • 专利标题: NON-VOLATILE MEMORY AND LOGIC CIRCUIT PROCESS INTEGRATION
  • 专利标题(中): 非易失性存储器和逻辑电路过程集成
  • 申请号: US13077501
    申请日: 2011-03-31
  • 公开(公告)号: US20120252171A1
    公开(公告)日: 2012-10-04
  • 发明人: Mehul D. ShroffMark D. Hall
  • 申请人: Mehul D. ShroffMark D. Hall
  • 主分类号: H01L21/82
  • IPC分类号: H01L21/82
NON-VOLATILE MEMORY AND LOGIC CIRCUIT PROCESS INTEGRATION
摘要:
A method for forming an integrated circuit for a non-volatile memory cell transistor is disclosed that includes: forming a layer of discrete storage elements over a substrate in a first region of the substrate and in a second region of the substrate; forming a first layer of dielectric material over the layer of discrete storage elements in the first region and the second region; forming a first layer of barrier work function material over the first layer of dielectric material in the first region and the second region; and removing the first layer of barrier work function material from the second region, the first layer of dielectric material from the second region, and the layer of discrete storage elements from the second region. After the removing, a second layer of barrier work function material is formed over the substrate in the first region and the second region. The second layer of barrier work function material is removed from the first region. A first gate of a memory device is formed in the first region. The first gate includes a portion of the first layer of barrier work function material. The memory device includes a charge storage structure including a portion of the layer of discrete storage elements. A second gate of a transistor is formed in the second region, the second gate including a portion of the second layer of barrier work function material.
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