发明申请
- 专利标题: Magnetic Sensor and Manfacturing Method Therefor
- 专利标题(中): 磁传感器及其制造方法
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申请号: US13459644申请日: 2012-04-30
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公开(公告)号: US20120272514A1公开(公告)日: 2012-11-01
- 发明人: Hiroshi Naito , Hideki Sato , Yukio Wakui , Masaysoshi Omura
- 申请人: Hiroshi Naito , Hideki Sato , Yukio Wakui , Masaysoshi Omura
- 申请人地址: JP Hamamatsu-Shi
- 专利权人: YAMAHA CORPORATION
- 当前专利权人: YAMAHA CORPORATION
- 当前专利权人地址: JP Hamamatsu-Shi
- 优先权: JP2005-77010 20050317; JP2005-88828 20050325; JP2005-91616 20050328; JP2005-91617 20050328; JP2005-98498 20050330; JP2005-131857 20050428; JP2005-350487 20051205
- 主分类号: H01F7/06
- IPC分类号: H01F7/06
摘要:
A magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming X-axis and Y-axis sensors are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels in the thick film. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.
公开/授权文献
- US09054028B2 Magnetic sensor and manufacturing method therefor 公开/授权日:2015-06-09
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