发明申请
US20120273658A1 MODULATION DEVICE AND CHARGED PARTICLE MULTI-BEAMLET LITHOGRAPHY SYSTEM USING THE SAME
有权
使用该方法的调制装置和带电颗粒多波束平移系统
- 专利标题: MODULATION DEVICE AND CHARGED PARTICLE MULTI-BEAMLET LITHOGRAPHY SYSTEM USING THE SAME
- 专利标题(中): 使用该方法的调制装置和带电颗粒多波束平移系统
-
申请号: US13281559申请日: 2011-10-26
-
公开(公告)号: US20120273658A1公开(公告)日: 2012-11-01
- 发明人: Marco Jan-Jaco Wieland , Teunis Van De Peut , Alexander Hendrik Vincent Van Veen , Remco Jager , Stijn Willem Herman Karel Steenbrink , Ralph Van Melle , Henk Derks
- 申请人: Marco Jan-Jaco Wieland , Teunis Van De Peut , Alexander Hendrik Vincent Van Veen , Remco Jager , Stijn Willem Herman Karel Steenbrink , Ralph Van Melle , Henk Derks
- 申请人地址: NL DELFT
- 专利权人: MAPPER LITHOGRAPHY IP B.V.
- 当前专利权人: MAPPER LITHOGRAPHY IP B.V.
- 当前专利权人地址: NL DELFT
- 主分类号: H01J3/26
- IPC分类号: H01J3/26 ; G21K5/04
摘要:
The invention relates to a charged-particle multi-beamlet lithography system. The system comprises a beam generator for generating a plurality of beamlets, a beamlet blanker array for patterning the plurality of beamlets, an optical fiber arrangement, and a projection system. The beamlet blanker array comprises a substrate provided with a first area comprising one or more modulators and a second area free of modulators. The beamlet blanker array comprises one or more light sensitive elements, electrically connected to the one or more modulators, and arranged to receive light beams carrying pattern data. The optical fiber arrangement comprises a plurality of optical fibers for guiding the light beams carrying pattern data towards the one or more light sensitive elements. The projection of the optical fiber arrangement onto a surface of the beamlet blanker array in a direction perpendicular to the surface falls entirely within the second area.
公开/授权文献
信息查询