发明申请
US20120279138A1 POLISHING PAD AND A METHOD FOR MANUFACTURING THE SAME 有权
抛光垫及其制造方法

POLISHING PAD AND A METHOD FOR MANUFACTURING THE SAME
摘要:
A polishing pad of excellent durability and adhesion between the polishing layer and the base material layer includes a polishing layer arranged on a base material layer, wherein the polishing layer includes a thermosetting polyurethane foam having roughly spherical interconnected cells having an average cell diameter of 20 to 300 μm The polyurethane foam includes an isocyanate component and an active hydrogen-containing compound as starting material components, and the active hydrogen-containing compound includes 30 to 85% by weight of a high-molecular-weight polyol having 2 to 4 functional groups and a hydroxyl value of 20 to 100 mg KOH/g.
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