发明申请
US20120280165A1 PIEZOELECTRIC FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT
有权
压电薄膜及其制造方法，喷墨头，由喷墨头，角速度传感器形成图像的方法，通过角速度传感器，压电发生元件测量角速度的方法，以及使用该方法生成电力的方法 压电元件
- 专利标题： PIEZOELECTRIC FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT
- 专利标题（中）： 压电薄膜及其制造方法，喷墨头，由喷墨头，角速度传感器形成图像的方法，通过角速度传感器，压电发生元件测量角速度的方法，以及使用该方法生成电力的方法 压电元件
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申请号： US13551018申请日： 2012-07-17
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公开(公告)号： US20120280165A1公开(公告)日： 2012-11-08
- 发明人: Takakiyo HARIGAI , Yoshiaki TANAKA , Hideaki ADACHI , Eiji FUJII
- 申请人： Takakiyo HARIGAI , Yoshiaki TANAKA , Hideaki ADACHI , Eiji FUJII
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 优先权： JP2010-136963 20100616
- 主分类号： H01L41/187
- IPC分类号： H01L41/187 ; G01P15/09 ; B41J2/045 ; H01L41/09 ; H01L41/00
摘要：
It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2-BaTiO3 layer with a (111) orientation, where 0.30≦x≦0.46 and 0.51≦y≦0.62.
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