发明申请
- 专利标题： PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME
- 专利标题（中）： 制备该方法的制备方法及方法
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申请号： US13105910申请日： 2011-05-12
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公开(公告)号： US20120286402A1公开(公告)日： 2012-11-15
- 发明人: Chin-Te Kuo , Yi-Nan Chen , Hsien-Wen Liu
- 申请人： Chin-Te Kuo , Yi-Nan Chen , Hsien-Wen Liu
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; H01L21/302 ; H01L23/48
摘要：
A cuboidal protuberant structure is provided. The cuboidal protuberant structure includes a substrate and a protrusion disposed on the substrate. The protrusion has a vertical side wall with a rounded corner, a protuberant width and a protuberant length. At least one of the protuberant width and the protuberant length is not greater than 33 nm.
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