Invention Application
US20120292195A1 APPARATUS AND METHOD FOR ELECTROPLATING FOR SEMICONDUCTOR SUBSTRATE 审中-公开
用于半导体基板电镀的装置和方法

APPARATUS AND METHOD FOR ELECTROPLATING FOR SEMICONDUCTOR SUBSTRATE
Abstract:
An apparatus for electroplating a semiconductor device includes a plating bath accommodating a plating solution, and a paddle in the plating bath, the paddle including a plurality of holes configured to pass the plating solution through the paddle toward a substrate, and a plating solution flow reinforcement portion configured to selectively reinforce a flow of the plating solution to a predetermined area of the substrate, the predetermined area of the substrate being an area requiring a relatively increased supply of metal ions of the plating solution.
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