Invention Application
US20120292195A1 APPARATUS AND METHOD FOR ELECTROPLATING FOR SEMICONDUCTOR SUBSTRATE
审中-公开
用于半导体基板电镀的装置和方法
- Patent Title: APPARATUS AND METHOD FOR ELECTROPLATING FOR SEMICONDUCTOR SUBSTRATE
- Patent Title (中): 用于半导体基板电镀的装置和方法
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Application No.: US13438020Application Date: 2012-04-03
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Publication No.: US20120292195A1Publication Date: 2012-11-22
- Inventor: Ui Hyoung LEE , Ju-Il Choi , Jae-Hyun Phee , Dong Hyeon Jang , Jeong-Woo Park
- Applicant: Ui Hyoung LEE , Ju-Il Choi , Jae-Hyun Phee , Dong Hyeon Jang , Jeong-Woo Park
- Priority: KR10-2011-0047188 20110519
- Main IPC: C25B15/00
- IPC: C25B15/00 ; C25B9/00

Abstract:
An apparatus for electroplating a semiconductor device includes a plating bath accommodating a plating solution, and a paddle in the plating bath, the paddle including a plurality of holes configured to pass the plating solution through the paddle toward a substrate, and a plating solution flow reinforcement portion configured to selectively reinforce a flow of the plating solution to a predetermined area of the substrate, the predetermined area of the substrate being an area requiring a relatively increased supply of metal ions of the plating solution.
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