发明申请
- 专利标题: METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
- 专利标题(中): 制造声波装置的方法
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申请号: US13480253申请日: 2012-05-24
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公开(公告)号: US20120297595A1公开(公告)日: 2012-11-29
- 发明人: Kazunori INOUE , Tsutomu MIYASHITA , Kazuhiro MATSUMOTO
- 申请人: Kazunori INOUE , Tsutomu MIYASHITA , Kazuhiro MATSUMOTO
- 申请人地址: JP Tokyo
- 专利权人: TAIYO YUDEN CO., LTD.
- 当前专利权人: TAIYO YUDEN CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-116552 20110525
- 主分类号: H01L41/00
- IPC分类号: H01L41/00
摘要:
A method for manufacturing an acoustic wave device includes: adhering wafer-shaped first and second piezoelectric substrates to a front face of a first and second adhesive sheet respectively and dividing the first and the second piezoelectric substrates into rectangles; adhering a third and fourth adhesive sheet to the first and second piezoelectric substrates respectively and moving at least one divided portions of the first and second piezoelectric substrates selectively to the third and fourth adhesive sheet respectively; moving the first piezoelectric substrate on the first adhesive sheet to the fourth adhesive sheet; and moving the second piezoelectric substrate on the second adhesive sheet to the third adhesive sheet.
公开/授权文献
- US08732923B2 Method for manufacturing acoustic wave device 公开/授权日:2014-05-27
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