Invention Application
- Patent Title: SEMICONDUCTOR CHIP HAVING VIA ELECTRODES AND STACKED SEMICONDUCTOR CHIPS INTERCONNECTED BY THE VIA ELECTRODES
- Patent Title (中): 通过电极和通过电极互连的堆叠半导体芯片的半导体芯片
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Application No.: US13569653Application Date: 2012-08-08
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Publication No.: US20120299194A1Publication Date: 2012-11-29
- Inventor: Ho-jin Lee , Hyun-soo Chung , Chang-seong Jeon , Sang-sick Park , Jae-hyun Phee
- Applicant: Ho-jin Lee , Hyun-soo Chung , Chang-seong Jeon , Sang-sick Park , Jae-hyun Phee
- Priority: KR10-2008-0104986 20081024
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device includes a semiconductor substrate and a via electrode. The via electrode has a first portion on the substrate and extends towards the substrate and has a plurality of spikes that extends from the first portion into the substrate, each of the spikes being spaced apart form one another.
Public/Granted literature
Information query
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