发明申请
US20120300186A1 MULTI-STAGE SYSTEM, A CONTROL METHOD THEREFOR, AND A LITHOGRAPHIC APPARATUS
有权
多级系统,其控制方法,以及一种平面设备
- 专利标题: MULTI-STAGE SYSTEM, A CONTROL METHOD THEREFOR, AND A LITHOGRAPHIC APPARATUS
- 专利标题(中): 多级系统,其控制方法,以及一种平面设备
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申请号: US13477669申请日: 2012-05-22
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公开(公告)号: US20120300186A1公开(公告)日: 2012-11-29
- 发明人: Hans BUTLER , Johannes Petrus Martinus Bernardus VERMEULEN
- 申请人: Hans BUTLER , Johannes Petrus Martinus Bernardus VERMEULEN
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G05B11/32
- IPC分类号: G05B11/32 ; G03B27/58
摘要:
A method for controlling a multi-stage system includes a stator extending parallel to a first direction; a first and second stage that are moveable relative to the stator; the stages being provided with a magnet system to generate a magnetic field, and the stator being provided with coils to interact with the magnetic fields to position the stages relative to the stator, the method including: determining the position of the stages; selecting a first and a second subset of coils that are capable of having a non-negligible interaction with the magnetic field of respectively the first and the second stage; activating the coils of both subsets, wherein activating the coils includes determining the coils that are part of both subsets; and excluding a coil that is part of both subsets from activating.
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