发明申请
- 专利标题: VARIABLE RESISTANCE MEMORY DEVICE AND METHODS OF FORMING THE SAME
- 专利标题(中): 可变电阻存储器件及其形成方法
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申请号: US13584070申请日: 2012-08-13
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公开(公告)号: US20120305884A1公开(公告)日: 2012-12-06
- 发明人: Gyuhwan Oh , Dong-Hyun Im , Soonoh Park , Dongho Ahn , Young-Lim Park , Eun-Hee Cho
- 申请人: Gyuhwan Oh , Dong-Hyun Im , Soonoh Park , Dongho Ahn , Young-Lim Park , Eun-Hee Cho
- 优先权: KR10-2008-0107236 20081030
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A method of forming a memory device includes forming a first interlayer insulating layer on a semiconductor substrate, forming a first electrode in the first interlayer insulating layer, the first electrode having a top surface of a rectangular shape extending in a first direction, and forming a variable resistance pattern on the first electrode, the variable resistance pattern having a bottom surface of a rectangular shape extending in a second direction crossing the first direction, the bottom surface of the variable resistance pattern contacting the first electrode, wherein the area of contact between the lower electrode and the variable resistance pattern is substantially equal to a multiplication of a minor axis length of a top surface of the first electrode and a minor axis length of a bottom surface of the variable resistance pattern.
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