发明申请
- 专利标题: METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY
- 专利标题(中): 用于稳健干涉测量的方法和装置
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申请号: US13574707申请日: 2011-01-21
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公开(公告)号: US20120307258A1公开(公告)日: 2012-12-06
- 发明人: Klaus Koerner , Reinhard Berger , Wolfgang Osten
- 申请人: Klaus Koerner , Reinhard Berger , Wolfgang Osten
- 申请人地址: DE Stuttgart
- 专利权人: UNIVERSITAET STUTTGART
- 当前专利权人: UNIVERSITAET STUTTGART
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102010006239.1 20100122; DE102010056123.3 20101220
- 国际申请: PCT/EP2011/000248 WO 20110121
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B9/02
摘要:
An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.
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