发明申请
US20120307258A1 METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY 有权
用于稳健干涉测量的方法和装置

METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY
摘要:
An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.
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