发明申请
US20120313204A1 Process Module for Increasing the Response of Backside Illuminated Photosensitive Imagers and Associated Methods 有权
用于增加背面照射光敏成像器的响应的过程模块和相关方法

Process Module for Increasing the Response of Backside Illuminated Photosensitive Imagers and Associated Methods
摘要:
Backside illuminated photosensitive devices and associated methods are provided. In one aspect, for example, a backside-illuminated photosensitive imager device can include a semiconductor substrate having multiple doped regions forming a least one junction, a textured region coupled to the semiconductor substrate and positioned to interact with electromagnetic radiation where the textured region includes surface features sized and positioned to facilitate tuning to a preselected wavelength of light, and a dielectric region positioned between the textured region and the at least one junction. The dielectric region is positioned to isolate the at least one junction from the textured region, and the semiconductor substrate and the textured region are positioned such that incoming electromagnetic radiation passes through the semiconductor substrate before contacting the textured region. Additionally, the device includes an electrical transfer element coupled to the semiconductor substrate to transfer an electrical signal from the at least one junction.
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