发明申请
US20120314993A1 BURIED-TYPE OPTICAL INPUT/OUTPUT DEVICES AND METHODS OF MANUFACTURING THE SAME 有权
BURIED型光输入/输出装置及其制造方法

BURIED-TYPE OPTICAL INPUT/OUTPUT DEVICES AND METHODS OF MANUFACTURING THE SAME
摘要:
Optical input/output (I/O) devices, which include a substrate including a trench, a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide. An upper surface of the photodetector is at a same level as an upper surface of the waveguide.
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