Invention Application
- Patent Title: Dual Path Gas Distribution Device
- Patent Title (中): 双路气体分配装置
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Application No.: US13596884Application Date: 2012-08-28
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Publication No.: US20120324692A1Publication Date: 2012-12-27
- Inventor: Jay Brian DeDontney
- Applicant: Jay Brian DeDontney
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B05B1/00
- IPC: B05B1/00

Abstract:
An apparatus for deploying two fluids separately into a reaction chamber is provided. The apparatus includes a first distribution network that is formed on a plate having a distribution face and a dispensing face. The first distribution network is defined by a plurality of recessed channels on the distribution face. The plurality of recessed channels includes a plurality of thru-ports that extend from the plurality of recessed channels to the dispensing face. The apparatus further includes a second distribution network that has passages formed below the plurality of recessed channels and above the dispensing face. A first set of ports extends from the passages to the distribution face and a second set of ports extends from a top surface of the distribution face to the dispensing face.
Public/Granted literature
- US08402845B2 Dual path gas distribution device Public/Granted day:2013-03-26
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