发明申请
- 专利标题: E-FUSE STRUCTURES AND METHODS OF MANUFACTURE
- 专利标题(中): 电子熔断器结构和制造方法
-
申请号: US13165087申请日: 2011-06-21
-
公开(公告)号: US20120326269A1公开(公告)日: 2012-12-27
- 发明人: GRISELDA BONILLA , Kaushik Chanda , Samuel S. Choi , Ronald G. Filippi , Stephan Grunow , Naftali E. Lustig , Andrew H. Simon
- 申请人: GRISELDA BONILLA , Kaushik Chanda , Samuel S. Choi , Ronald G. Filippi , Stephan Grunow , Naftali E. Lustig , Andrew H. Simon
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L21/768
摘要:
E-fuse structures in back end of the line (BEOL) interconnects and methods of manufacture are provided. The method includes forming an interconnect via in a substrate in alignment with a first underlying metal wire and forming an e-fuse via in the substrate, exposing a second underlying metal wire. The method further includes forming a defect with the second underlying metal wire and filling the interconnect via with metal and in contact with the first underlying metal wire thereby forming an interconnect structure. The method further includes filling the e-fuse via with the metal and in contact with the defect and the second underlying metal wire thereby forming an e-fuse structure.
公开/授权文献
- US09059169B2 E-fuse structures and methods of manufacture 公开/授权日:2015-06-16
信息查询
IPC分类: