发明申请
US20120328836A1 Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity 有权
允许多个阶段以近距离操作的方法和装置

Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity
摘要:
According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage
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