发明申请
US20130009312A1 INTERCONNECT STRUCTURE FABRICATED WITHOUT DRY PLASMA ETCH PROCESSING
审中-公开
互连结构在没有干等离子体处理的情况下制成
- 专利标题: INTERCONNECT STRUCTURE FABRICATED WITHOUT DRY PLASMA ETCH PROCESSING
- 专利标题(中): 互连结构在没有干等离子体处理的情况下制成
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申请号: US13603017申请日: 2012-09-04
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公开(公告)号: US20130009312A1公开(公告)日: 2013-01-10
- 发明人: Maxime Darnon , Jeffrey P. Gambino , Elbert E. Huang , Qinghuang Lin
- 申请人: Maxime Darnon , Jeffrey P. Gambino , Elbert E. Huang , Qinghuang Lin
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/485
- IPC分类号: H01L23/485 ; H05K1/09 ; H05K1/02
摘要:
An interconnect structure within a microelectronic structure and a method for fabricating the interconnect structure within the microelectronic structure use a developable bottom anti-reflective coating layer and at least one imageable inter-level dielectric layer located thereupon over a substrate that includes a base dielectric layer and a first conductor layer located and formed embedded within the base dielectric layer. Incident to use of the developable bottom anti-reflective coating layer and the at least one imageable inter-level dielectric layer, an aperture, such as but not limited to a dual damascene aperture, may be formed through the at least one imageable inter-level dielectric layer and the developable anti-reflective coating layer to expose a capping layer located and formed upon the first conductor layer, absent use of a dry plasma etch method when forming the interconnect structure within the microelectronic structure.
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