发明申请
- 专利标题: POLISHING SLURRY AND POLISHING METHOD THEREFOR
- 专利标题(中): 抛光浆和抛光方法
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申请号: US13634939申请日: 2010-11-22
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公开(公告)号: US20130012102A1公开(公告)日: 2013-01-10
- 发明人: Yasuhide Yamaguchi , Mikimasa Horiuchi
- 申请人: Yasuhide Yamaguchi , Mikimasa Horiuchi
- 优先权: JP2010-090837 20100409
- 国际申请: PCT/JP2010/070795 WO 20101122
- 主分类号: C09K3/14
- IPC分类号: C09K3/14 ; B24B37/00
摘要:
The present invention provides a polishing technique which enables polishing of silicon carbide, which is difficult to be polished, with high efficiency and high surface accuracy. The present invention relates to a polishing slurry for polishing a substrate, which comprises abrasive particles containing manganese oxide as a main component and in which the content of the abrasive particles is less than 10% by weight based on the polishing slurry. The polishing slurry of the present invention has a pH of preferably 7 or more. It is particularly preferable to use manganese dioxide as abrasive particles. The polishing slurry of the present invention is suitable for a substrate of silicon carbide.
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