发明申请
- 专利标题: METHOD FOR MANUFACTURING RECORDING HEAD
- 专利标题(中): 制造记录头的方法
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申请号: US13540960申请日: 2012-07-03
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公开(公告)号: US20130017496A1公开(公告)日: 2013-01-17
- 发明人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
- 申请人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-155733 20110714
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.
公开/授权文献
- US08481249B2 Method for manufacturing recording head 公开/授权日:2013-07-09
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