公开(公告)号：US08481249B2

公开(公告)日：2013-07-09

申请号：US13540960

申请日：2012-07-03

申请人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

发明人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

IPC分类号： B41J2/16

CPC分类号： G03F7/095 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  G03F7/0035 ,  G03F7/038 ,  G03F7/094 ,  G03F7/38

摘要： A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.

摘要翻译： 一种用于制造记录头的方法，包括在具有喷射能量产生元件的基板和其上布线的基板上形成包含感光性树脂的流路侧壁形成层; 将流路侧壁形成层暴露于光，并光学地确定流路; 形成含有感光性树脂的形状稳定层; 形成含有光聚合引发剂和负性感光性树脂的喷射孔形成层; 将喷射孔形成层暴露于光，并且光学地确定喷射孔; 并按顺序显影喷射孔形成层，形状稳定层和流动通道侧壁形成层。 形状稳定层中的感光性树脂是通过喷射孔形成层的曝光而产生并从光聚合引发剂得到的成分固化的材料。

公开(公告)号：US20130017496A1

公开(公告)日：2013-01-17

申请号：US13540960

申请日：2012-07-03

申请人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

发明人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

IPC分类号： G03F7/20

CPC分类号： G03F7/095 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  G03F7/0035 ,  G03F7/038 ,  G03F7/094 ,  G03F7/38

摘要： A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.

摘要翻译： 一种用于制造记录头的方法，包括在具有喷射能量产生元件的基板和其上布线的基板上形成包含感光性树脂的流路侧壁形成层; 将流路侧壁形成层暴露于光，并光学地确定流路; 形成含有感光性树脂的形状稳定层; 形成含有光聚合引发剂和负性感光性树脂的喷射孔形成层; 将喷射孔形成层暴露于光，并且光学地确定喷射孔; 并按顺序显影喷射孔形成层，形状稳定层和流动通道侧壁形成层。 形状稳定层中的感光性树脂是通过喷射孔形成层的曝光而产生并从光聚合引发剂得到的成分固化的材料。

公开(公告)号：US08450050B2

公开(公告)日：2013-05-28

申请号：US13540960

申请日：2012-07-03

申请人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

发明人： Keiji Matsumoto ,  Kazuhiro Asai ,  Tetsuro Honda ,  Kunihito Uohashi ,  Shuji Koyama ,  Masaki Ohsumi

IPC分类号： B41J2/16

摘要： A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.

公开(公告)号：US08329047B2

公开(公告)日：2012-12-11

申请号：US12635083

申请日：2009-12-10

申请人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

发明人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

IPC分类号： G01D15/00

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  Y10T29/49401

摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.

摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。

公开(公告)号：US08128204B2

公开(公告)日：2012-03-06

申请号：US13009709

申请日：2011-01-19

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/05 ,  B41J2/04 ,  G11B5/127 ,  B21D53/76

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US07930824B2

公开(公告)日：2011-04-26

申请号：US12411901

申请日：2009-03-26

申请人： Masaki Ohsumi ,  Shuji Koyama ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Kenji Fujii ,  Yoshinobu Urayama ,  Jun Yamamuro

发明人： Masaki Ohsumi ,  Shuji Koyama ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Kenji Fujii ,  Yoshinobu Urayama ,  Jun Yamamuro

IPC分类号： B23P17/00 ,  B21D53/00 ,  G01D15/00 ,  G11B5/127 ,  B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/494 ,  Y10T29/49401

摘要： A method of manufacturing an ink jet recording head includes the steps of: forming an adhesive layers and the side walls of a flow path on a substrate; pasting a dry film, which is a part of a flow path forming member, on the side walls; and forming discharge ports in the layer.

摘要翻译： 一种制造喷墨记录头的方法包括以下步骤：在基底上形成粘合层和流路的侧壁; 在侧壁上粘贴作为流路形成构件的一部分的干膜; 并在该层中形成排出口。

公开(公告)号：US07735961B2

公开(公告)日：2010-06-15

申请号：US11551084

申请日：2006-10-19

申请人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

发明人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

IPC分类号： B41J2/205

CPC分类号： B41J2/1433 ,  B41J2/162 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1637 ,  B41J2/1645

摘要： A liquid discharge head including an energy generating element configured to generate energy required for discharging a liquid, a substrate having the energy generating element formed thereon, and an orifice member provided on the substrate and including a plurality of discharge ports facilitating discharging the liquid and a plurality of flow paths communicating respectively with the plurality of discharge ports. The orifice member is constituted by a first resin forming a portion connected to at least the substrate and a second resin connected to the first resin and forming the plurality of discharge ports, and the first resin includes a silane material in a larger amount than the second resin.

摘要翻译： 一种液体排出头，包括被配置为产生排出液体所需的能量的能量产生元件，其上形成有能量产生元件的基板和设置在该基板上的孔部件，并且包括多个排出口以排出液体， 多个流路与多个排出口分别连通。 孔部件由形成至少与基板连接的部分的第一树脂和与第一树脂连接并形成多个排出口的第二树脂构成，第一树脂包括比第二树脂更大量的硅烷材料 树脂。

公开(公告)号：US20070091147A1

公开(公告)日：2007-04-26

申请号：US11551084

申请日：2006-10-19

申请人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

发明人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

IPC分类号： B41J2/05

CPC分类号： B41J2/1433 ,  B41J2/162 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1637 ,  B41J2/1645

摘要： A liquid discharge head including an energy generating element configured to generate energy required for discharging a liquid, a substrate having the energy generating element formed thereon, and an orifice member provided on the substrate and including a plurality of discharge ports facilitating discharging the liquid and a plurality of flow paths communicating respectively with the plurality of discharge ports. The orifice member is constituted by a first resin forming a portion connected to at least the substrate and a second resin connected to the first resin and forming the plurality of discharge ports, and the first resin includes a silane material in a larger amount than the second resin.

摘要翻译： 一种液体排出头，包括被配置为产生排出液体所需的能量的能量产生元件，其上形成有能量产生元件的基板和设置在该基板上的孔部件，并且包括多个排出口以排出液体， 多个流路与多个排出口分别连通。 孔部件由形成至少与基板连接的部分的第一树脂和与第一树脂连接并形成多个排出口的第二树脂构成，第一树脂包括比第二树脂更大量的硅烷材料 树脂。

公开(公告)号：US07901064B2

公开(公告)日：2011-03-08

申请号：US11625537

申请日：2007-01-22

申请人： Yoshinobu Urayama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinori Tagawa ,  Shuji Koyama

发明人： Yoshinobu Urayama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinori Tagawa ,  Shuji Koyama

IPC分类号： B41J2/175 ,  B41J2/05 ,  B41J2/045

CPC分类号： B41J2/1603 ,  B41J2/14145 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2002/14403

摘要： An ink jet recording head includes: a substrate; a plurality of ink discharge ports formed to a front face side of the substrate, and a plurality of ink flow paths communicating with the ink discharge ports; an ink supply opening extending through the substrate and communicating with the plurality of ink flow paths; and a filter formed in an opening portion of the ink supply opening arranged in the front face side of the substrate, the filter being constituted of two or more stacked films having formed therein a plurality of opening portions. In this case, the stacked films are arranged with a spacing therebetween.

摘要翻译： 喷墨记录头包括：基板; 形成在所述基板的正面侧的多个排墨口以及与所述排墨口连通的多个墨流路; 供墨开口，延伸穿过基板并与多个墨流路连通; 以及形成在所述基板的正面侧的所述供墨口的开口部的过滤器，所述过滤器由形成有多个开口部的两层以上的层叠膜构成。 在这种情况下，堆叠的膜以它们之间的间隔布置。

公开(公告)号：US20110107598A1

公开(公告)日：2011-05-12

申请号：US13009709

申请日：2011-01-19

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B21D53/76

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。