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公开(公告)号:US20130017496A1
公开(公告)日:2013-01-17
申请号:US13540960
申请日:2012-07-03
申请人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
发明人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
IPC分类号: G03F7/20
CPC分类号: G03F7/095 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , G03F7/0035 , G03F7/038 , G03F7/094 , G03F7/38
摘要: A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.
摘要翻译: 一种用于制造记录头的方法,包括在具有喷射能量产生元件的基板和其上布线的基板上形成包含感光性树脂的流路侧壁形成层; 将流路侧壁形成层暴露于光,并光学地确定流路; 形成含有感光性树脂的形状稳定层; 形成含有光聚合引发剂和负性感光性树脂的喷射孔形成层; 将喷射孔形成层暴露于光,并且光学地确定喷射孔; 并按顺序显影喷射孔形成层,形状稳定层和流动通道侧壁形成层。 形状稳定层中的感光性树脂是通过喷射孔形成层的曝光而产生并从光聚合引发剂得到的成分固化的材料。
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公开(公告)号:US08481249B2
公开(公告)日:2013-07-09
申请号:US13540960
申请日:2012-07-03
申请人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
发明人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
IPC分类号: B41J2/16
CPC分类号: G03F7/095 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , G03F7/0035 , G03F7/038 , G03F7/094 , G03F7/38
摘要: A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.
摘要翻译: 一种用于制造记录头的方法,包括在具有喷射能量产生元件的基板和其上布线的基板上形成包含感光性树脂的流路侧壁形成层; 将流路侧壁形成层暴露于光,并光学地确定流路; 形成含有感光性树脂的形状稳定层; 形成含有光聚合引发剂和负性感光性树脂的喷射孔形成层; 将喷射孔形成层暴露于光,并且光学地确定喷射孔; 并按顺序显影喷射孔形成层,形状稳定层和流动通道侧壁形成层。 形状稳定层中的感光性树脂是通过喷射孔形成层的曝光而产生并从光聚合引发剂得到的成分固化的材料。
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公开(公告)号:US08450050B2
公开(公告)日:2013-05-28
申请号:US13540960
申请日:2012-07-03
申请人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
发明人: Keiji Matsumoto , Kazuhiro Asai , Tetsuro Honda , Kunihito Uohashi , Shuji Koyama , Masaki Ohsumi
IPC分类号: B41J2/16
摘要: A method for manufacturing a recording head including forming a flow-channel side-wall forming layer which contains a photosensitive resin, on a substrate having ejection energy generating elements and wiring thereon; exposing the flow-channel side-wall forming layer to light, and optically determining a flow channel; forming a shape stabilizing layer which contains a photosensitive resin; forming an ejection orifice forming layer which contains a photopolymerization initiator and a negative photosensitive resin; exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side-wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice forming layer and derives from the photopolymerization initiator.
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