发明申请
US20130027070A1 METHOD AND DEVICE FOR CONTACTING A ROW OF CONTACT AREAS WITH PROBE TIPS
有权
用于与接触区域接触的方法和设备与探测器提示
- 专利标题： METHOD AND DEVICE FOR CONTACTING A ROW OF CONTACT AREAS WITH PROBE TIPS
- 专利标题（中）： 用于与接触区域接触的方法和设备与探测器提示
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申请号： US13640432申请日： 2010-04-13
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公开(公告)号： US20130027070A1公开(公告)日： 2013-01-31
- 发明人: Claus Dietrich , Stojan Kanev , Frank Fehrmann , Botho Hirschfeld
- 申请人： Claus Dietrich , Stojan Kanev , Frank Fehrmann , Botho Hirschfeld
- 申请人地址： US OR BEAVERTON
- 专利权人： CASCADE MICROTECH INC
- 当前专利权人： CASCADE MICROTECH INC
- 当前专利权人地址： US OR BEAVERTON
- 国际申请： PCT/EP10/54829 WO 20100413
- 主分类号： G01R1/067
- IPC分类号： G01R1/067
摘要：
The invention generally relates to a method and device for contacting contact areas (22) with probe tips (18) in a tester. The contact areas (22), which are arranged on a substrate (6), and the probe tips (18) are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (18), the contacting between the probe tips (18) and the contact areas (22) is observed from at least two observation directions (34), which include an observation angle α in a range of 0 to 180°.