公开(公告)号：US09784763B1

公开(公告)日：2017-10-10

申请号：US15094716

申请日：2016-04-08

申请人： Cascade Microtech, Inc.

发明人： Michael Teich ,  Karsten Stoll ,  Walter Matthias Clauss ,  Swen Schmiedchen

IPC分类号： G01R31/10 ,  G01R1/18 ,  G01R1/067 ,  G01R1/44 ,  G01R1/073 ,  G01N27/42 ,  G01N31/02

CPC分类号： G01R1/18 ,  G01N27/42 ,  G01N31/02 ,  G01R1/06711 ,  G01R1/07378 ,  G01R1/07392 ,  G01R1/44

摘要： Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.

公开(公告)号：US09435858B2

公开(公告)日：2016-09-06

申请号：US13634009

申请日：2011-03-14

申请人： Peter Andrews ,  David Hess

发明人： Peter Andrews ,  David Hess

IPC分类号： G01R31/28 ,  G01B9/04 ,  G01B21/16

CPC分类号： G01R31/2891

摘要： Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.

摘要翻译： 本文公开了用于测试半导体的聚焦光学系统和方法。 所述方法包括通过显微镜的单个光路接收探针的图像，基本上将显微镜聚焦在探针上，以及基于聚焦来确定探针和被测器件之间的垂直高度调节。

公开(公告)号：US20140239991A1

公开(公告)日：2014-08-28

申请号：US14243640

申请日：2014-04-02

申请人： CASCADE MICROTECH, INC.

发明人： Michael Teich ,  Stojan Kanev ,  Hans-Jurgen Fleischer

IPC分类号： G01R1/04

CPC分类号： G01R1/0408 ,  G01R31/2855 ,  G01R31/2874 ,  G01R31/2875 ,  G01R31/2886

摘要： A method and an apparatus for verifying or testing test substrates, i.e. wafers and other electronic semiconductor components, in a prober under defined thermal conditions. Such a verifying apparatus, known to the person skilled in the art as a prober, has a housing having at least two housing sections, in one housing section of which, designated hereinafter as test chamber, the test substrate to be verified is held by a chuck and is set to a defined temperature, and in the other housing section of which, designated hereinafter as probe chamber, probes are held. For verification purposes, the test substrate and the probes are positioned relative to one another by means of at least one positioning device and the probes subsequently make contact with the test substrate.

摘要翻译： 一种用于在确定的热条件下在探测器中验证或测试测试基板，即晶片和其它电子半导体部件的方法和装置。 这种本领域技术人员已知的探测器的验证装置具有壳体，该壳体具有至少两个壳体部分，在其一个壳体部分中，下文称为测试室，待验证的测试基板由 卡盘并设定在限定的温度，并且在其另一个壳体部分中，下文称为探针室，探针被保持。 为了验证目的，测试基板和探针通过至少一个定位装置相对于彼此定位，并且探头随后与测试基板接触。

公开(公告)号：US20140028337A1

公开(公告)日：2014-01-30

申请号：US13953545

申请日：2013-07-29

申请人： Cascade Microtech, Inc.

发明人： Joerg Kiesewetter ,  Stojan Kanev ,  Michael Teich ,  Karsten Stoll ,  Axel Schmidt

IPC分类号： G01R31/28

CPC分类号： G01R31/2891 ,  G01R31/2874

摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.

摘要翻译： 在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。 存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

公开(公告)号：US20130220513A1

公开(公告)日：2013-08-29

申请号：US13854725

申请日：2013-04-01

申请人： CASCADE MICROTECH, INC.

发明人： Kenneth R. Smith

IPC分类号： G01R35/00 ,  B32B38/10

CPC分类号： G01R31/2891 ,  B32B38/10 ,  G01R1/06711 ,  G01R1/06772 ,  G01R1/0735 ,  G01R35/00 ,  Y10T29/49126

摘要： The contacts of a probing apparatus are elastically supported on a replaceable coupon and electrically interconnected with conductors on a membrane or a space transformer.

摘要翻译： 探测装置的触点弹性地支撑在可更换的试样上并与膜或空间变压器上的导体电互连。

公开(公告)号：US08410806B2

公开(公告)日：2013-04-02

申请号：US12592186

申请日：2009-11-20

申请人： Kenneth R. Smith

发明人： Kenneth R. Smith

IPC分类号： G01R1/067

CPC分类号： G01R31/2891 ,  B32B38/10 ,  G01R1/06711 ,  G01R1/06772 ,  G01R1/0735 ,  G01R35/00 ,  Y10T29/49126

摘要： The contacts of a probing apparatus are elastically supported on a replaceable coupon and electrically interconnected with conductors on a membrane or a space transformer.

摘要翻译： 探测装置的触点弹性地支撑在可更换的试样上并与膜或空间变压器上的导体电互连。

公开(公告)号：US08319503B2

公开(公告)日：2012-11-27

申请号：US12590955

申请日：2009-11-16

申请人： Kazuki Negishi ,  Mark Hansen

发明人： Kazuki Negishi ,  Mark Hansen

IPC分类号： G01R29/26 ,  G01R31/20

CPC分类号： G01R1/18 ,  G01R29/26

摘要： A flicker noise test system includes a guarded signal path and an unguarded signal path selectively connectable to respective terminals of a device under test. The selected signal path is connectable a terminal without disconnecting cables or changing probes.

摘要翻译： 闪烁噪声测试系统包括有保护的信号路径和可选择性地连接到被测设备的相应终端的无保护信号路径。 所选择的信号路径可连接终端，而不断开电缆或更换探头。

公开(公告)号：US08278951B2

公开(公告)日：2012-10-02

申请号：US11940355

申请日：2007-11-15

申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

IPC分类号： G01R31/00

CPC分类号： G01R31/2886 ,  G01R1/18

摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.

摘要翻译： 适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是 最小化，并且还包括用于准备测试信号的装置。 此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

公开(公告)号：US20120146676A1

公开(公告)日：2012-06-14

申请号：US13380484

申请日：2010-06-16

申请人： Botho Hirschfeld ,  Stojan Kanev

发明人： Botho Hirschfeld ,  Stojan Kanev

IPC分类号： G01R31/02

CPC分类号： G01R31/2891

摘要： A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.

摘要翻译： 公开了用于测量探测器中的功率器件的方法，其用于检测和测试这些部件。 在该过程中，功率器件由卡盘保持，并且至少一个电探针由探针保持器保持，并且可选地，功率器件或探针通过具有电驱动器的定位装置相对于另一个定位 并接触电源设备。 同时，当确定探测器26和接触区域之间的接触被建立时，探针之间的电气连接保持在与发送或接收功率信号的信号单元之间被阻挡并且仅被解除阻塞。

公开(公告)号：US08167648B2

公开(公告)日：2012-05-01

申请号：US13030961

申请日：2011-02-18

申请人： Kazuki Negishi ,  Michael Simmons ,  Christopher Storm ,  ToeNaing Swe

发明人： Kazuki Negishi ,  Michael Simmons ,  Christopher Storm ,  ToeNaing Swe

IPC分类号： H01R9/05

CPC分类号： G01R31/2889 ,  H01R13/6597 ,  H01R24/562 ,  H01R2201/20

摘要： An adapter conductively interconnects a chuck of a probe station and an instrument. The adapter includes a signal conductor conductively connected to the chuck and selectively connectable to a respective one of a ground potential, a bayonet connector output and a signal connection for the instrument. A guard potential conductor conductively connected to the chuck and selectively connectable to a one of a ground potential and a guard connection for the instrument; and a shield conductor connected to a ground potential.

摘要翻译： 适配器导电地互连探针台的卡盘和仪器。 适配器包括导体连接到卡盘并且可选地可连接到地面电位，卡口连接器输出和仪器的信号连接中的相应一个的信号导体。 导电连接到卡盘并且可选择地连接到仪器的接地电位和保护连接中的一个的保护电位导体; 以及连接到地电位的屏蔽导体。