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公开(公告)号：US08922229B2
公开(公告)日：2014-12-30
申请号：US13380484
申请日：2010-06-16
申请人： Botho Hirschfeld , Stojan Kanev
发明人： Botho Hirschfeld , Stojan Kanev
CPC分类号： G01R31/2891
摘要： A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.
摘要翻译： 公开了用于测量探测器中的功率器件的方法，其用于检测和测试这些部件。 在该过程中，功率器件由卡盘保持，并且至少一个电探针由探针保持器保持，并且可选地，功率器件或探针通过具有电驱动器的定位装置相对于另一个定位 并接触电源设备。 同时，当确定探测器26和接触区域之间的接触被建立时，探针之间的电气连接保持在与发送或接收功率信号的信号单元之间被阻挡并且仅被解除阻塞。
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2.发明申请公开(公告)号：US20130027070A1
公开(公告)日：2013-01-31
申请号：US13640432
申请日：2010-04-13
申请人： Claus Dietrich , Stojan Kanev , Frank Fehrmann , Botho Hirschfeld
发明人： Claus Dietrich , Stojan Kanev , Frank Fehrmann , Botho Hirschfeld
IPC分类号： G01R1/067
CPC分类号： G01R31/2891
摘要： The invention generally relates to a method and device for contacting contact areas (22) with probe tips (18) in a tester. The contact areas (22), which are arranged on a substrate (6), and the probe tips (18) are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (18), the contacting between the probe tips (18) and the contact areas (22) is observed from at least two observation directions (34), which include an observation angle α in a range of 0 to 180°.
摘要翻译： 本发明总体上涉及用于使接触区域（22）与测试仪中的探针尖端（18）接触的方法和装置。 布置在基板（6）上的接触区域（22）和探针尖端（18）相对于彼此定位，然后通过前进运动彼此接触。 为了检测每个探针尖端（18）的牢固接触，从至少两个观察方向（34）观察探针尖端（18）和接触区域（22）之间的接触，其中包括观察角 α在0〜180度的范围内。
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公开(公告)号：US07282930B2
公开(公告)日：2007-10-16
申请号：US11314624
申请日：2005-12-21
申请人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
发明人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
IPC分类号： G01R31/302
CPC分类号： G01R31/2831
摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.
摘要翻译： 提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转 避免卡片，也适用于200mm及以上的基材直径。 该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板 可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或 粘合剂等
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公开(公告)号：US06688156B2
公开(公告)日：2004-02-10
申请号：US09754711
申请日：2001-01-04
IPC分类号： G01L2700
CPC分类号： G01L27/007
摘要： The invention relates to a tester for pressure sensors in the wafer compound or isolated pressure sensors having a recess for the pressure sensors as well as means for electrical contacting of the electrical connections of at least one of the pressure sensors. The invention is intended to make it possible to test pressure sensors still in a wafer compound for their function. According to the invention, a pressure head is provided which has an interior space open on one side, the open face of which is capable of being mounted on the pressure sensor in such a way that the interior space is tightly sealed by the latter. In this way a static or dynamic pressure of specified amount and duration can be exerted on the sensor element at least so that the sensor element is moved out of its resting position. At the same time, the electrical connections of the selected pressure sensor are connected with an electrical evaluation unit.
摘要翻译： 本发明涉及一种用于晶片化合物中的压力传感器的测试器或具有用于压力传感器的凹部的隔离压力传感器，以及用于电连接至少一个压力传感器的电连接的装置。 本发明旨在使其能够测试晶片化合物中的压力传感器的功能。 根据本发明，提供一种压力头，其具有在一侧开口的内部空间，其敞开面能够以这样的方式安装在压力传感器上，使得内部空间被密封。 以这种方式，可以至少使传感器元件移动到其静止位置之外，在传感器元件上施加规定量和持续时间的静态或动态压力。 同时，所选择的压力传感器的电气连接与电气评估单元连接。
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5.发明授权公开(公告)号：US09110131B2
公开(公告)日：2015-08-18
申请号：US13640432
申请日：2010-04-13
申请人： Claus Dietrich , Stojan Kanev , Frank Fehrmann , Botho Hirschfeld
发明人： Claus Dietrich , Stojan Kanev , Frank Fehrmann , Botho Hirschfeld
CPC分类号： G01R31/2891
摘要： The invention generally relates to a method and device for contacting contact areas (22) with probe tips (18) in a tester. The contact areas (22), which are arranged on a substrate (6), and the probe tips (18) are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (18), the contacting between the probe tips (18) and the contact areas (22) is observed from at least two observation directions (34), which include an observation angle α in a range of 0 to 180°.
摘要翻译： 本发明总体上涉及用于使接触区域（22）与测试仪中的探针尖端（18）接触的方法和装置。 布置在基板（6）上的接触区域（22）和探针尖端（18）相对于彼此定位，然后通过前进运动彼此接触。 为了检测每个探针尖端（18）的牢固接触，从至少两个观察方向（34）观察探针尖端（18）和接触区域（22）之间的接触，其中包括观察角 α在0〜180度的范围内。
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公开(公告)号：US20070139067A1
公开(公告)日：2007-06-21
申请号：US11314624
申请日：2005-12-21
申请人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
发明人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
IPC分类号： G01R31/26
CPC分类号： G01R31/2831
摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.)
摘要翻译： 提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转 避免卡片，也适用于200mm及以上的基材直径。 该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板 可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或 粘合剂等）
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公开(公告)号：US20120146676A1
公开(公告)日：2012-06-14
申请号：US13380484
申请日：2010-06-16
申请人： Botho Hirschfeld , Stojan Kanev
发明人： Botho Hirschfeld , Stojan Kanev
IPC分类号： G01R31/02
CPC分类号： G01R31/2891
摘要： A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.
摘要翻译： 公开了用于测量探测器中的功率器件的方法，其用于检测和测试这些部件。 在该过程中，功率器件由卡盘保持，并且至少一个电探针由探针保持器保持，并且可选地，功率器件或探针通过具有电驱动器的定位装置相对于另一个定位 并接触电源设备。 同时，当确定探测器26和接触区域之间的接触被建立时，探针之间的电气连接保持在与发送或接收功率信号的信号单元之间被阻挡并且仅被解除阻塞。
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公开(公告)号：US08344744B2
公开(公告)日：2013-01-01
申请号：US12818442
申请日：2010-06-18
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译： 提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。 该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。 在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置 在定位期间相对于卡盘是恒定的。 信号前置放大器通过测量电缆连接到壳体外部的测量单元。
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公开(公告)号：US20110227602A1
公开(公告)日：2011-09-22
申请号：US12818442
申请日：2010-06-18
IPC分类号： G01R31/26
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译： 提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。 该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。 在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置 在定位期间相对于卡盘是恒定的。 信号前置放大器通过测量电缆连接到壳体外部的测量单元。
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公开(公告)号：US09194885B2
公开(公告)日：2015-11-24
申请号：US13820098
申请日：2011-09-02
申请人： Stojan Kanev , Botho Hirschfeld , Axel Becker , Ulf Hackius
发明人： Stojan Kanev , Botho Hirschfeld , Axel Becker , Ulf Hackius
IPC分类号： G01R1/04 , G01R31/26 , G01R31/28 , G01R31/319
CPC分类号： G01R1/0408 , G01R31/2601 , G01R31/2868 , G01R31/31907
摘要： The invention relates to a prober for checking and testing electronic semiconductor components and methods of using the same. The prober comprises at least two checking units, each of which is equipped with a chuck, probes, and a positioning unit, and each of which is assigned to a machine control system and a process control system. The prober further comprises a loading unit for automatically loading both testing units and an additional loader for manually loading at least one of the testing units, a user interface, and a module control system for controlling the process control systems and/or the machine control systems and the loading unit. The user interface can optionally be connected to at least one of the process control systems or the module control system by means of a switching device of the prober.
摘要翻译： 本发明涉及用于检查和测试电子半导体元件的探测器及其使用方法。 探测器包括至少两个检查单元，每个检查单元都配备有卡盘，探针和定位单元，并且每个检查单元分配给机器控制系统和过程控制系统。 探测器还包括用于自动加载两个测试单元的加载单元和用于手动加载至少一个测试单元的附加加载器，用户界面和用于控制过程控制系统和/或机器控制系统的模块控制系统 和装载单元。 用户界面可以通过探测器的切换装置可选地连接到过程控制系统或模块控制系统中的至少一个。
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