发明申请
US20130029278A1 METHOD FOR SYNTHESIZING GROUP II-VI COMPOUND SEMICONDUCTOR POLYCRYSTALS
审中-公开
用于合成II-VI族化合物半导体多晶体的方法
- 专利标题: METHOD FOR SYNTHESIZING GROUP II-VI COMPOUND SEMICONDUCTOR POLYCRYSTALS
- 专利标题(中): 用于合成II-VI族化合物半导体多晶体的方法
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申请号: US13638456申请日: 2011-03-11
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公开(公告)号: US20130029278A1公开(公告)日: 2013-01-31
- 发明人: Toshiaki Asahi , Akira Noda
- 申请人: Toshiaki Asahi , Akira Noda
- 申请人地址: JP Tokyo
- 专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-074010 20100329
- 国际申请: PCT/JP2011/055748 WO 20110311
- 主分类号: F27D3/00
- IPC分类号: F27D3/00 ; F27D9/00
摘要:
Provided is a method for synthesizing group II-VI compound semiconductor polycrystals in which synthesis can be accomplished without the use of a quart ampoule as the polycrystal synthesis vessel, and as a result it is possible to use a larger vessel without reducing yield, and costs can thereby be reduced. Two or more starting elements are introduced to a semi-airtight pBN inner vessel (6a), the inner vessel is introduced to a semi-airtight heat-resistant outer vessel (6b) and placed in a high-pressure furnace (1) having a heating means (7), the air inside the high-pressure furnace is evacuated and the furnace is filled with an inert gas under a predetermined pressure, the outer vessel and inner vessel are heated and the temperature is raised using the heating means, the starting elements inside the inner vessel are melted and reacted, and the temperature is then gradually lowered to promote growth of polycrystals.
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