发明申请
- 专利标题： SURFACE TREATMENTS FOR ALIGNMENT OF BLOCK COPOLYMERS
- 专利标题（中）： 表面处理嵌段共聚物的配位
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申请号： US13583518申请日： 2011-03-17
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公开(公告)号： US20130045361A1公开(公告)日： 2013-02-21
- 发明人: C. Grant Willson , Christopher M. Bates , Jeffrey Strahan , Christopher John Ellison
- 申请人： C. Grant Willson , Christopher M. Bates , Jeffrey Strahan , Christopher John Ellison
- 优先权： US61315278 20100318
- 国际申请： PCT/US11/28858 WO 20110317
- 主分类号： B32B27/32
- IPC分类号： B32B27/32 ; B32B33/00 ; B05D1/38 ; B05D3/12 ; B82Y30/00 ; B82Y40/00
摘要：
The present invention relates to a method the synthesis and utilization of random, cross-linked, substituted polystyrene copolymers as polymeric cross-linked surface treatments (PXSTs) to control the orientation of physical features of a block copolymer deposited over the first copolymer. Such methods have many uses including multiple applications in the semi-conductor industry including production of templates for nanoimprint lithography.
公开/授权文献
- US09120947B2 Surface treatments for alignment of block copolymers 公开/授权日：2015-09-01
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