发明申请
- 专利标题: COATING BASED ON DIAMOND-LIKE CARBON
- 专利标题(中): 基于金刚石碳的涂料
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申请号: US13548550申请日: 2012-07-13
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公开(公告)号: US20130045367A1公开(公告)日: 2013-02-21
- 发明人: Hans-Joachim Scheibe , Thomas Schuelke , Lars Haubold , Michael Becker , Yaran Mahmut
- 申请人: Hans-Joachim Scheibe , Thomas Schuelke , Lars Haubold , Michael Becker , Yaran Mahmut
- 申请人地址: US MI Plymouth DE Muenchen
- 专利权人: Fraunhofer USA, Inc.,Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- 当前专利权人: Fraunhofer USA, Inc.,Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- 当前专利权人地址: US MI Plymouth DE Muenchen
- 主分类号: B32B3/30
- IPC分类号: B32B3/30 ; B32B7/02 ; C23C14/32 ; B32B9/04
摘要:
A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.
公开/授权文献
- US08911868B2 Coating based on diamond-like carbon 公开/授权日:2014-12-16
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