Invention Application
- Patent Title: COATING BASED ON DIAMOND-LIKE CARBON
- Patent Title (中): 基于金刚石碳的涂料
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Application No.: US13548550Application Date: 2012-07-13
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Publication No.: US20130045367A1Publication Date: 2013-02-21
- Inventor: Hans-Joachim Scheibe , Thomas Schuelke , Lars Haubold , Michael Becker , Yaran Mahmut
- Applicant: Hans-Joachim Scheibe , Thomas Schuelke , Lars Haubold , Michael Becker , Yaran Mahmut
- Applicant Address: US MI Plymouth DE Muenchen
- Assignee: Fraunhofer USA, Inc.,Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer USA, Inc.,Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: US MI Plymouth DE Muenchen
- Main IPC: B32B3/30
- IPC: B32B3/30 ; B32B7/02 ; C23C14/32 ; B32B9/04

Abstract:
A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.
Public/Granted literature
- US08911868B2 Coating based on diamond-like carbon Public/Granted day:2014-12-16
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