发明申请
- 专利标题： CAPACITIVE TRANSDUCER AND METHODS OF MANUFACTURING AND OPERATING THE SAME
- 专利标题（中）： 电容式传感器及其制造和运行方法
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申请号： US13591845申请日： 2012-08-22
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公开(公告)号： US20130049528A1公开(公告)日： 2013-02-28
- 发明人: Che-heung KIM
- 申请人： Che-heung KIM
- 申请人地址： KR Suwon-si
- 专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2011-0083582 20110822
- 主分类号： H01L29/92
- IPC分类号： H01L29/92 ; H02N11/00 ; H01L21/02
摘要：
Provided are a capacitive transducer, and methods of manufacturing and operating the same. The capacitive transducer includes: a monolithic substrate comprising a first doping region, a second doping region that is opposite in conductivity to the first doping region, and a vibrating portion; and an empty space that is disposed between the first doping region and the vibrating portion. The vibrating portion includes a plurality of through-holes, and a material film for sealing the plurality of through-holes is disposed on the vibrating portion.
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