发明申请
US20130052587A1 PATTERNING PROCESS AND RESIST COMPOSITION 有权
绘图工艺和耐腐蚀组合物

PATTERNING PROCESS AND RESIST COMPOSITION
摘要:
A negative pattern is formed by coating a resist composition comprising a methylol-substituted urea, amide or urethane compound, a polymer comprising recurring units having an acid labile group-substituted hydroxyl group, and an acid generator onto a substrate, prebaking, exposing to high-energy radiation, and developing in an organic solvent developer such that the unexposed region of resist film is dissolved away and the exposed region of resist film is not dissolved. In image formation via positive/negative reversal by organic solvent development, the resist film is characterized by a high dissolution contrast between the unexposed and exposed regions.
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