发明申请
- 专利标题： FIXED CURVATURE FORCE LOADING OF MECHANICALLY SPALLED FILMS
- 专利标题（中）： 固定曲面力加载机械薄膜
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申请号： US13215738申请日： 2011-08-23
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公开(公告)号： US20130052798A1公开(公告)日： 2013-02-28
- 发明人: Stephen W. Bedell , Keith E. Fogel , Paul A. Lauro , Xiao Hu Liu , Devendra K. Sadana
- 申请人： Stephen W. Bedell , Keith E. Fogel , Paul A. Lauro , Xiao Hu Liu , Devendra K. Sadana
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L21/30
- IPC分类号： H01L21/30
摘要：
A spalling method is provided that includes depositing a stressor layer on surface of a base substrate, and contacting the stressor layer with a planar transfer. The planar transfer surface is then traversed along a plane that is parallel to and having a vertical offset from the upper surface of the base substrate. The planar transfer surface is traversed in a direction from a first edge of the base substrate to an opposing second edge of the base substrate to cleave the base substrate and transfer a spalled portion of the base substrate to the planar transfer surface. The vertical offset between the plane along which the planar transfer surface is traversed and the upper surface of the base substrate is a fixed distance. The fixed distance of the vertical offset provides a uniform spalling force. A spalling method is also provided that includes a transfer roller.
公开/授权文献
- US08679943B2 Fixed curvature force loading of mechanically spalled films 公开/授权日：2014-03-25
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