发明申请
US20130067723A1 DEVICE FOR FORMING A REDUCED CHAMBER SPACE, AND METHOD FOR POSITIONING MULTILAYER BODIES 有权
用于形成减少空间的装置以及用于定位多层体的方法

DEVICE FOR FORMING A REDUCED CHAMBER SPACE, AND METHOD FOR POSITIONING MULTILAYER BODIES
摘要:
A device for forming a reduced chamber space, which is a process box or a process hood, containing an apparatus, which positions at least two multilayer bodies each including a surface to be processed, wherein the apparatus is designed such that the multilayer bodies are opposite to each other, wherein the surfaces to be processed are facing away from each other such that the multilayer bodies can be processed as a multilayer body arrangement in a processing system. In addition, a method for positioning the two multilayer bodies comprising a surface to be processed, with the two multilayer bodies disposed in such a device such that multilayer bodies are opposite each other, wherein the surfaces to be processed are facing away from each other, such that the multilayer bodies are processable as a multilayer body arrangement in a processing system.
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