发明申请
US20130074762A1 MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF A GROUP III NITRIDE CRYSTAL
审中-公开
第三类氮化物晶体的制造方法和制造装置
- 专利标题: MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF A GROUP III NITRIDE CRYSTAL
- 专利标题(中): 第三类氮化物晶体的制造方法和制造装置
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申请号: US13679499申请日: 2012-11-16
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公开(公告)号: US20130074762A1公开(公告)日: 2013-03-28
- 发明人: Hirokazu Iwata , Seiji Sarayama , Minoru Fukuda , Tetsuya Takahashi , Akira Takahashi
- 申请人: Hirokazu Iwata , Seiji Sarayama , Minoru Fukuda , Tetsuya Takahashi , Akira Takahashi
- 优先权: JP2005-070833 20050314; JP2005-070859 20050314; JP2005-070889 20050314; JP2006-066574 20060310
- 主分类号: C30B19/02
- IPC分类号: C30B19/02 ; C30B19/06
摘要:
A method for manufacturing a group III nitride crystal on a seed crystal in a holding vessel holding therein a melt containing a group III metal, an alkali metal and nitrogen. The manufacturing method comprises the steps of causing the seed crystal to make a contact with the melt, setting an environment of the seed crystal to a first state offset from a crystal growth condition while in a state in which said seed crystal is in contact with the melt, increasing a nitrogen concentration in the melt, and setting the environment of the seed crystal to a second state suitable for crystal growth when the nitrogen concentration of the melt has reached a concentration suitable for growing the seed crystal.
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