发明申请
- 专利标题: CROSS-SECTIONAL DILATION MODE RESONATORS
- 专利标题(中): 交叉分段模式谐振器
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申请号: US13295970申请日: 2011-11-14
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公开(公告)号: US20130083044A1公开(公告)日: 2013-04-04
- 发明人: Chengjie Zuo , Changhan Yun , Chi Shun Lo , Wesley Nathaniel Allen , Mario Francisco Velez , Jonghae Kim
- 申请人: Chengjie Zuo , Changhan Yun , Chi Shun Lo , Wesley Nathaniel Allen , Mario Francisco Velez , Jonghae Kim
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人: QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人地址: US CA San Diego
- 主分类号: G06F13/14
- IPC分类号: G06F13/14 ; H01L41/053 ; H01L41/047
摘要:
Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.
公开/授权文献
- US09099986B2 Cross-sectional dilation mode resonators 公开/授权日:2015-08-04
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