Cross-sectional dilation mode resonators
    5.
    发明授权
    Cross-sectional dilation mode resonators 有权
    横截面扩张模式谐振器

    公开(公告)号:US09099986B2

    公开(公告)日:2015-08-04

    申请号:US13295970

    申请日:2011-11-14

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿着Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。

    CROSS-SECTIONAL DILATION MODE RESONATORS
    6.
    发明申请
    CROSS-SECTIONAL DILATION MODE RESONATORS 有权
    交叉分段模式谐振器

    公开(公告)号:US20130083044A1

    公开(公告)日:2013-04-04

    申请号:US13295970

    申请日:2011-11-14

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿着Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。

    CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER FILTERS
    10.
    发明申请
    CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER FILTERS 有权
    交叉分段模式谐振器和基于谐振器的梯形滤波器

    公开(公告)号:US20130082799A1

    公开(公告)日:2013-04-04

    申请号:US13295978

    申请日:2011-11-14

    IPC分类号: H03H9/58 H01L41/04

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。