Cross-sectional dilation mode resonators and resonator-based ladder filters
    1.
    发明授权
    Cross-sectional dilation mode resonators and resonator-based ladder filters 有权
    横截面扩张模式谐振器和基于谐振器的梯形滤波器

    公开(公告)号:US09270254B2

    公开(公告)日:2016-02-23

    申请号:US13295978

    申请日:2011-11-14

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。

    Cross-sectional dilation mode resonators
    2.
    发明授权
    Cross-sectional dilation mode resonators 有权
    横截面扩张模式谐振器

    公开(公告)号:US09099986B2

    公开(公告)日:2015-08-04

    申请号:US13295970

    申请日:2011-11-14

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿着Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。

    CROSS-SECTIONAL DILATION MODE RESONATORS
    3.
    发明申请
    CROSS-SECTIONAL DILATION MODE RESONATORS 有权
    交叉分段模式谐振器

    公开(公告)号:US20130083044A1

    公开(公告)日:2013-04-04

    申请号:US13295970

    申请日:2011-11-14

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿着Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。

    CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER FILTERS
    4.
    发明申请
    CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER FILTERS 有权
    交叉分段模式谐振器和基于谐振器的梯形滤波器

    公开(公告)号:US20130082799A1

    公开(公告)日:2013-04-04

    申请号:US13295978

    申请日:2011-11-14

    IPC分类号: H03H9/58 H01L41/04

    摘要: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    摘要翻译: 公开了机电系统扩张模式谐振器(DMR)结构。 DMR包括第一电极层,第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离(D)和与X轴正交的Z轴的厚度(T) 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式,其具有沿Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件,并且谐振器可以具有螺旋配置。

    Radio frequency switch for diversity receiver
    6.
    发明授权
    Radio frequency switch for diversity receiver 有权
    用于分集接收机的射频开关

    公开(公告)号:US09008602B2

    公开(公告)日:2015-04-14

    申请号:US13464092

    申请日:2012-05-04

    摘要: A diversity receiver switch includes at least one second stage switch configured to communicate with a transceiver. The diversity receiver switch may also include at least one first stage switch coupled between a diversity receiver antenna and the second stage switch(es). The first stage switch(es) may be configured to handle a different amount of power than the second stage switch(es). The diversity receiver switch may include a bank of second stage switches configured to communicate with a transceiver. A first stage switch may be configured to handle more power than each switch in the bank of second stage switches. Alternatively, the diversity receiver switch include a bank of first stage switches coupled between the diversity receiver antenna and a second stage switch. The second stage switch may be configured to handle more power than each of the first stage switches.

    摘要翻译: 分集接收机交换机包括被配置为与收发机通信的至少一个第二级交换机。 分集接收机交换机还可以包括耦合在分集接收机天线和第二级交换机之间的至少一个第一级交换机。 第一级开关可以被配置为处理与第二级开关不同的功率量。 分集接收器开关可以包括被配置为与收发器通信的一组第二级交换机。 第一级开关可以被配置为处理比第二级开关组中的每个开关更多的功率。 或者,分集接收器开关包括耦合在分集接收器天线和第二级开关之间的一组第一级开关。 第二级开关可以被配置为处理比每个第一级开关更多的功率。

    Metal-semiconductor wafer bonding for high-Q devices
    7.
    发明授权
    Metal-semiconductor wafer bonding for high-Q devices 有权
    用于高Q器件的金属半导体晶片接合

    公开(公告)号:US08907450B2

    公开(公告)日:2014-12-09

    申请号:US13293075

    申请日:2011-11-09

    摘要: Methods and apparatus for metal semiconductor wafer bonding for high-Q devices are provided. An exemplary capacitor includes a first plate formed on a glass substrate, a second plate, and a dielectric layer. No organic bonding agent is used between the first plate and the glass substrate, and the dielectric layer can be an intrinsic semiconductor. A extrinsic semiconductor layer that is heavily doped contacts the dielectric layer. The dielectric and extrinsic semiconductor layers are sandwiched between the first and second plates. An intermetallic layer is formed between the first plate and the dielectric layer. The intermetallic layer is thermo compression bonded to the first plate and the dielectric layer. The capacitor can be coupled in a circuit as a high-Q capacitor and/or a varactor, and can be integrated with a mobile device.

    摘要翻译: 提供了用于高Q装置的金属半导体晶片接合的方法和装置。 示例性电容器包括形成在玻璃基板,第二板和介电层上的第一板。 在第一板和玻璃基板之间不使用有机粘合剂,并且电介质层可以是本征半导体。 重掺杂的非本征半导体层接触电介质层。 电介质和非本征半导体层夹在第一和第二板之间。 在第一板和电介质层之间形成金属间层。 金属间化合物层被热压接合到第一板和电介质层。 电容器可以作为高Q电容器和/或变容二极管耦合在电路中,并且可以与移动设备集成。

    RADIO FREQUENCY SWITCH FOR DIVERSITY RECEIVER

    公开(公告)号:US20130295866A1

    公开(公告)日:2013-11-07

    申请号:US13464092

    申请日:2012-05-04

    IPC分类号: H04B1/16

    摘要: A diversity receiver switch includes at least one second stage switch configured to communicate with a transceiver. The diversity receiver switch may also include at least one first stage switch coupled between a diversity receiver antenna and the second stage switch(es). The first stage switch(es) may be configured to handle a different amount of power than the second stage switch(es). The diversity receiver switch may include a bank of second stage switches configured to communicate with a transceiver. A first stage switch may be configured to handle more power than each switch in the bank of second stage switches. Alternatively, the diversity receiver switch include a bank of first stage switches coupled between the diversity receiver antenna and a second stage switch. The second stage switch may be configured to handle more power than each of the first stage switches.

    Electromechanical systems piezoelectric contour mode differential resonators and filters
    9.
    发明授权
    Electromechanical systems piezoelectric contour mode differential resonators and filters 有权
    机电系统压电轮廓模式差动谐振器和滤波器

    公开(公告)号:US09083300B2

    公开(公告)日:2015-07-14

    申请号:US13094707

    申请日:2011-04-26

    摘要: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.

    摘要翻译: 本公开提供了机电系统谐振器结构,设备,装置,系统和相关过程的实现。 一方面,轮廓模式谐振器装置包括具有多个第一层电极的第一导电层,所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。 第二导电层包括多个第二层电极,其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。 可以在第二导电层的第一电极或第二电极处提供第二信号,以与第一输入信号或第一输出信号配合以限定差分信号。 压电层设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

    Piezoelectric resonator having combined thickness and width vibrational modes
    10.
    发明授权
    Piezoelectric resonator having combined thickness and width vibrational modes 有权
    具有组合厚度和宽度振动模式的压电谐振器

    公开(公告)号:US08987976B2

    公开(公告)日:2015-03-24

    申请号:US13241356

    申请日:2011-09-23

    IPC分类号: H01L41/047 H03H9/02 H03H9/56

    摘要: A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.

    摘要翻译: 公开了一种具有组合的厚度和宽度振动模式的压电谐振器的方法和装置。 压电谐振器可以包括压电衬底和耦合到压电衬底的第一表面的第一电极。 压电谐振器还可以包括耦合到压电基板的第二表面的第二电极,其中第一表面和第二表面基本平行并且限定压电基板的厚度尺寸。 此外,压电基板的厚度尺寸和宽度尺寸被构造成当激励信号施加到电极时,从厚度振动模式和宽度振动模式的相干组合产生谐振。