发明申请
- 专利标题: MOSFET AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): MOSFET及其制造方法
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申请号: US13580053申请日: 2011-11-18
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公开(公告)号: US20130093020A1公开(公告)日: 2013-04-18
- 发明人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人地址: CN Beijing
- 专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人地址: CN Beijing
- 优先权: CN201110308554.4 20111012
- 国际申请: PCT/CN2011/082415 WO 20111118
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/336
摘要:
The present application discloses a MOSFET and a method for manufacturing the same. The MOSFET is formed on an SOI wafer, comprising: a shallow trench isolation for defining an active region in the semiconductor layer; a gate stack on the semiconductor layer; a source region and a drain region in the semiconductor layer on both sides of the gate stack; a channel region in the semiconductor layer and sandwiched by the source region and the drain region; a back gate in the semiconductor substrate; a first dummy gate stack overlapping with a boundary between the semiconductor layer and the shallow trench isolation; and a second dummy gate stack on the shallow trench isolation, wherein the MOSFET further comprises a plurality of conductive vias which are disposed between the gate stack and the first dummy gate stack and electrically connected to the source region and the drain region respectively, and between the first dummy gate stack and the second dummy gate stack and electrically connected to the back gate. The MOSFET avoids short circuit between the back gate and the source/drain regions by the dummy gate stacks.
公开/授权文献
- US08952453B2 MOSFET formed on an SOI wafer with a back gate 公开/授权日:2015-02-10
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